Redesign of the scanning electron microscope for parallel energy spectral acquisition

Anjam Khursheed; Hung Quang Hoang

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Redesign of the scanning electron microscope for parallel energy spectral acquisition

机译：重新设计扫描电子显微镜以获取平行能谱

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This paper presents a scanning electron microscope (SEM) design that is compatible with parallel electron energy spectrum acquisition. The SEM should in principle be capable of capturing the energy spectrum of all scattered electrons simultaneously, from low energy secondary electrons to elastic backscattered electrons. Preliminary simulation results predict that the beam separator spectrometer will have a relatively high transmission-energy resolution performance, comparable or better than the cylindrical mirror analyzer (CMA), while at the same time being able to capture the entire energy range of scattered electrons.

机译：本文提出了一种与并行电子能谱采集兼容的扫描电子显微镜（SEM）设计。 SEM原则上应该能够同时捕获所有散射电子的能谱，从低能二次电子到弹性反向散射电子。初步的模拟结果预测，束分离器光谱仪将具有相对较高的透射能量分辨率性能，与柱面镜分析仪（CMA）相当或更好，同时能够捕获散射电子的整个能量范围。

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《Ultramicroscopy》 |2008年第2期|共7页
作者
Anjam Khursheed; Hung Quang Hoang;
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原文格式 PDF
正文语种 eng
中图分类光学仪器;
关键词
Scanning electron microscope; Electron energy spectrometers; Magnetic beam separator;

机译：扫描电子显微镜;电子能谱仪;磁束分离器;

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专利

1. Redesign of the scanning electron microscope for parallel energy spectral acquisition [J] . Anjam Khursheed, Hung Quang Hoang Ultramicroscopy . 2008,第2期

机译：重新设计扫描电子显微镜以获取平行能谱
2. Acquisition parameters optimization of a transmission electron forward scatter diffraction system in a cold-field emission scanning electron microscope for nanomaterials characterization [J] . Nicolas Brodusch, Hendrix Demers, Michel Trudeau, Scanning . 2013,第6期

机译：冷场发射扫描电子显微镜中透射电子前向散射衍射系统的采集参数优化，用于表征纳米材料
3. An electron beam lithography and digital image acquisition system for scanning electron microscopes [J] . Russev S, Tsutsumanova G, Angelov S, Journal of Microscopy . 2007,第Pta1期

机译：用于扫描电子显微镜的电子束光刻和数字图像采集系统
4. Electron energy analysis at the nanometer scale using a near field emission scanning electron microscope (NFESEM) [C] . Ashish Suri, A. Pratt, S.P. Tear, International Vacuum Nanoelectronics Conference . 2018

机译：使用近场发射扫描电子显微镜（NFESEM）在纳米级进行电子能分析
5. Characterization of multiphase polymer morphology with electron energy-loss spectroscopy in the scanning transmission electron microscope. [D] . Siangchaew, Krisda. 1999

机译：在扫描透射电子显微镜中用电子能量损失光谱法表征多相聚合物形态。
6. Nanoscale Mapping of Bromide Segregation on the CrossSections of Complex Hybrid Perovskite Photovoltaic Films Using Secondary Electron Hyperspectral Imagingin a Scanning Electron Microscope [O] . Vikas Kumar, *, Whitney L. Schmidt, 2017

机译：十字架上溴化物偏析的纳米级映射使用二次电子高光谱成像的复杂混合钙钛矿光伏薄膜的截面在扫描电子显微镜中
7. Acquisition of the Angular Distribution of Backscattered Electrons in the Scanning Low Energy Electron Microscope [O] . Miillerova Ilona 2006

机译：扫描低能电子显微镜中背散射电子的角分布的获取
8. Acquisition of a Scanning Electron Microscope for Electron Beam Lithography [R] . Lukens, J. 1999

机译：收购用于电子束光刻的扫描电子显微镜

Redesign of the scanning electron microscope for parallel energy spectral acquisition

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