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Encapsulation method for atom probe tomography analysis of nanoparticles

机译:纳米粒子原子探针层析成像分析的封装方法

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摘要

Open-space nanomaterials are a widespread class of technologically important materials that are generally incompatible with analysis by atom probe tomography (APT) due to issues with specimen preparation, field evaporation and data reconstruction. The feasibility of encapsulating such non-compact matter in a matrix to enable APT measurements is investigated using nanoparticles as an example. Simulations of field evaporation of a void, and the resulting artifacts in ion trajectory, underpin the requirement that no voids remain after encapsulation. The approach is demonstrated by encapsulating Pt nanoparticles in an ZnO:Al matrix created by atomic layer deposition, a growth technique which offers very high surface coverage and conformality. APT measurements of the Pt nanoparticles are correlated with transmission electron microscopy images and numerical simulations in order to evaluate the accuracy of the APT reconstruction. (C) 2015 Elsevier B.V. All rights reserved.
机译:开放空间纳米材料是一类广泛的技术上重要的材料,由于样品制备,现场蒸发和数据重建等问题,它们通常与原子探针层析成像(APT)分析不兼容。以纳米颗粒为例,研究了将这种非致密物质封装在基质中以进行APT测量的可行性。空隙的场蒸发的模拟以及离子轨迹中产生的伪像,对封装后不留空隙的要求提供了支持。通过将Pt纳米颗粒封装在由原子层沉积产生的ZnO:Al基质中来证明了该方法,该原子层沉积是一种提供非常高的表面覆盖率和保形性的生长技术。 Pt纳米粒子的APT测量值与透射电子显微镜图像和数值模拟相关联,以评估APT重建的准确性。 (C)2015 Elsevier B.V.保留所有权利。

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