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HAADF-STEM atom counting in atom probe tomography specimens: Towards quantitative correlative microscopy

机译：原子探针层析成像样品中的HAADF-STEM原子计数：迈向定量相关显微镜

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The geometry of atom probe tomography tips strongly differs from standard scanning transmission electron microscopy foils. Whereas the later are rather flat and thin (< 20 nm), tips display a curved surface and a significantly larger thickness. As far as a correlative approach aims at analysing the same specimen by both techniques, it is mandatory to explore the limits and advantages imposed by the particular geometry of atom probe tomography specimens. Based on simulations (electron probe propagation and image simulations), the possibility to apply quantitative high angle annular dark field scanning transmission electron microscopy to of atom probe tomography specimens has been tested. The influence of electron probe convergence and the benefice of deconvolution of electron probe point spread function electron have been established. Atom counting in atom probe tomography specimens is for the first time reported in this present work. It is demonstrated that, based on single projections of high angle annular dark field imaging, significant quantitative information can be used as additional input for refining the data obtained by correlative analysis of the specimen in APT, therefore opening new perspectives in the field of atomic scale tomography. (C) 2015 Elsevier B.V. All rights reserved.
机译：原子探针层析成像尖端的几何形状与标准扫描透射电子显微镜箔有很大不同。尽管后者相当平坦且薄（<20 nm），但是尖端显示出弯曲的表面和明显更大的厚度。只要相关方法旨在通过两种技术分析同一样本，就必须探究原子探针层析成像样本的特定几何形状所带来的限制和优势。基于模拟（电子探针传播和图像模拟），已经测试了将定量高角度环形暗场扫描透射电子显微镜应用于原子探针层析成像标本的可能性。已经建立了电子探针收敛的影响和电子探针点扩散函数电子去卷积的受益。在这项工作中，首次报道了原子探针层析成像样品中的原子计数。结果表明，基于大角度环形暗场成像的单个投影，大量的定量信息可以用作补充输入，以细化通过APT中样品的相关分析获得的数据，从而为原子尺度领域开辟了新的前景。断层扫描。 （C）2015 Elsevier B.V.保留所有权利。

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