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Application of complex macromolecular architectures for advanced microelectronic materials [Review]

机译:复杂的高分子结构在先进微电子材料中的应用[综述]

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摘要

The distinctive features of well-defined, three-dimensional macromolecules with topologies designed to enhance solubility and amplify end-group functionality facilitated nanophase morphologies in mixtures with organosilicates and ultimately nanoporous organosilicate networks. Novel macromolecular architectures including dendritic and star-shaped polymers and organic nanoparticles were prepared by a modular approach from several libraries of building blocks including various generations of dendritic initiators. and dendrons, selectively placed to amplify functionality and/or arm number, coupled with living polymerization techniques. Mixtures of an organosilicate and the macromolecular template were deposited, cured, and the phase separation of the organic component, organized the vitrifying organosilicate into nanostructures. Removal of the sacrificial macromolecular template, also denoted as porogen, by thermolysis, yielded the desired nanoporous organosilicate, and the size scale of, phase separation was strongly dependent on the chain topology. These materials were designed for. use as interlayer, ultra low dielectric insulators for on-chip, applications,with dielectric constant values as low as 1.5. The porogen design, chemistry and role of polymer architecture on hybrid and pore morphology will be emphasized. [References: 139]
机译:定义明确的三维大分子具有独特的特征,其拓扑结构旨在提高溶解度并增强端基官能团,从而促进了与有机硅酸盐和纳米多孔有机硅酸盐网络混合物的纳米相形态。通过模块化方法,从包括多个世代的树突状引发剂的多个构件库中,通过模块化方法制备了包括树枝状和星形聚合物以及有机纳米颗粒在内的新型大分子结构。选择性地放置以增强功能和/或臂数的树突和树枝状分子,再加上活性聚合技术。沉积,固化有机硅酸盐和大分子模板的混合物,并进行有机成分的相分离,将玻璃化有机硅酸盐组织成纳米结构。通过热解去除牺牲性大分子模板(也称为致孔剂),得到所需的纳米多孔有机硅酸盐,并且相分离的尺寸规模强烈取决于链拓扑。这些材料是专为。用作层间超低介电绝缘子,用于片上应用,介电常数值低至1.5。将着重介绍成孔剂的设计,化学性质以及聚合物结构在杂化和孔形态上的作用。 [参考:139]

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