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首页> 外文期刊>The Analyst: The Analytical Journal of the Royal Society of Chemistry: A Monthly International Publication Dealing with All Branches of Analytical Chemistry >DETERMINATION OF ULTRATRACE AMOUNTS OF METALLIC AND CHLORIDE ION IMPURITIES IN ORGANIC MATERIALS FOR MICROELECTRONICS DEVICES AFTER A MICROWAVE DIGESTION METHOD
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DETERMINATION OF ULTRATRACE AMOUNTS OF METALLIC AND CHLORIDE ION IMPURITIES IN ORGANIC MATERIALS FOR MICROELECTRONICS DEVICES AFTER A MICROWAVE DIGESTION METHOD

机译：微波消解法测定微电子设备中有机材料中金属和氯离子的微量杂质含量。

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摘要

A digestion method was developed for the determination of ultratrace concentrations of sodium, potassium, magnesium, calcium and chloride ions, Using ETAAS and ion chromatography, the digestion method was applied successfully to the determination of ultratrace concentrations of these elements in organic materials for microelectronics devices such as photoresists, epoxy resins, and liquid crystals, Very low contamination levels were maintained throughout the procedure, The blank levels were 0.05 ng for sodium, 0.02 ng for potassium, 0.03 ng for magnesium and calcium, and 20 ng for chloride ion, The method is very effective in measuring the impurity distributions of organic materials whilst preventing their contamination from the surrounding environment and from the reagents used in the procedure. [References: 13]
机译：建立了一种消解方法，用于测定钠，钾，镁，钙和氯离子的超痕量浓度。采用ETAAS和离子色谱法，该消解方法已成功应用于微电子器件有机材料中这些元素的超痕量浓度测定。例如光致抗蚀剂，环氧树脂和液晶，在整个过程中均保持极低的污染水平，空白水平为钠0.05 ng，钾0.02 ng，镁和钙0.03 ng，氯离子20 ng。该方法在测量有机材料的杂质分布的同时非常有效，同时还可以防止有机材料被周围环境和过程中使用的试剂污染。 [参考：13]

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