首页> 外文期刊>The journal of physical chemistry, A. Molecules, spectroscopy, kinetics, environment, & general theory >Metastable Metal Ion Production in Sputtering dc Glow Discharge Plasmas: Characterization by Electronic State Chromatography
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Metastable Metal Ion Production in Sputtering dc Glow Discharge Plasmas: Characterization by Electronic State Chromatography

机译:溅射直流辉光放电等离子体中的亚稳态金属离子产生:通过电子状态色谱法表征

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The sputtering dc glow discharge is a stable and intense source of a wide variety of metal ions for use in ion/molecule studies. We have examined factors influencing the formation of metastable excited states of sputtered species in this device using the electronic state chromatography (ESC) technique. These determinations are essential if the glow discharge is to be used as a source of metal ions for subsequent reaction, since the electronic configuration of the metal can dramatically affect its reactivity in the gas phase. Further, the ability to manipulate excited-state production provides the means for the study of state-specific behavior of these species. We have obtained evidence in a series of experiments that indicates that the glow discharge is capable of producing several metal ions in metastable excited states as well as the ground state. Identification of specific configurations for several first-, second-, and third-row metal ions has been made on the basis of reduced zero-field mobilities in He. Results suggest that significant population of excited states higher than approximately 3.4 eV above the ion ground state does not occur in an Ar discharge for the metals examined here. Examination of the dependence of configuration distributions for several metal ions has revealed that excited-state production is sensitive to certain discharge parameters including pressure, distance to sampling orifice, and working gas composition. These results suggest that production of excited metal ions in the discharge involves energetic electrons. Further, some degree of deactivation of excited states occurs prior to extraction for ions whose excited states are collisionally coupled to lower states via interaction with the discharge gas. Metastable deactivation is enhanced in the third-row ions as a result of large spin-orbit effects.
机译:溅射直流辉光放电是用于离子/分子研究的多种金属离子的稳定且强烈的来源。我们已经使用电子状态色谱(ESC)技术检查了影响此设备中溅射物种的亚稳态激发态形成的因素。如果辉光放电将用作后续反应的金属离子源,则这些确定至关重要,因为金属的电子构型会极大地影响其在气相中的反应性。此外,操纵激发态产生的能力为研究这些物种的特定态行为提供了手段。我们已经通过一系列实验获得了证据,这些实验表明辉光放电能够以亚稳态激发态以及基态产生几种金属离子。基于He中零场迁移率的降低,已经确定了几种第一,第二和第三行金属离子的特定构型。结果表明,此处检测到的金属在Ar放电中不会出现高于离子基态约3.4 eV以上的大量激发态。对几种金属离子的构型分布的依赖性研究表明,激发态产生对某些放电参数敏感,包括压力,到采样孔的距离和工作气体成分。这些结果表明,放电中激发金属离子的产生涉及高能电子。此外,在提取离子之前,激发态会发生某种程度的失活,这些离子的激发态通过与放电气体的相互作用而碰撞地耦合到较低态。由于大的自旋轨道效应,第三行离子的亚稳态失活得到增强。

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