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首页> 外文期刊>Surface & Coatings Technology >Growth of carbon nanofiber coatings on nickel thin films on fused silica by catalytic thermal chemical vapor deposition: On the use of titanium, titanium-tungsten and tantalum as adhesion layers
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Growth of carbon nanofiber coatings on nickel thin films on fused silica by catalytic thermal chemical vapor deposition: On the use of titanium, titanium-tungsten and tantalum as adhesion layers

机译：通过催化热化学气相沉积法在熔融二氧化硅上的镍薄膜上生长碳纳米纤维涂层：使用钛，钛钨和钽作为粘合层

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摘要

Coatings of carbon nanofiber (CNF) layers were synthesized on fused silica substrates using a catalytic thermal chemical vapor deposition process (C-TCVD). The effects of various adhesion layers-titanium, titanium-tungsten and tantalum-under the nickel thin film on the attachment of carbon nanofibers and their morphological properties are presented. The diameter and the thicknesses of the CNF-coatings were analyzed by scanning electron microscopy, whereas the microstructure and crystallinity of the synthesized carbon nanofibers were investigated by transmission electron microscopy and Raman spectroscopy, respectively. Specific surface areas of CNF-coatings; were determined with nitrogen adsorption-desorption isotherm measurements.Using C-TCVD of ethylene at 700 degrees C (1 h), well-attached, entangled, quasi-crystal line platelet carbon nanofibers were synthesized with tip-type growth mode on 25 nm thick nickel films with an adhesion layer of 10 nm Ta or Ti-W. The thickness of CNF-coating was similar to 3.5 mu m, and the diameter of the fibers depended on the composition of the metallic thin film stack: 20-50 nm for Ni/Ta and 80-125 nm for Ni/Ti-W. The ultimate goal is the integration of these CNF-coatings as catalyst support in microfluiclic devices, for which it is important to control CNF-coating characteristics such as fiber diameter, layer thickness, specific surface area and adhesion to the surface.
机译：使用催化热化学气相沉积工艺（C-TCVD）在熔融石英基底上合成了碳纳米纤维（CNF）层的涂层。提出了镍薄膜下的钛，钛，钨和钽等各种粘附层对碳纳米纤维附着及其形态学特性的影响。通过扫描电子显微镜分析了CNF涂层的直径和厚度，而通过透射电子显微镜和拉曼光谱研究了合成的碳纳米纤维的微观结构和结晶度。 CNF涂层的比表面积;用氮气吸附-解吸等温线测定。使用乙烯在700摄氏度（1 h）下进行C-TCVD，以25 nm厚的尖端型生长方式合成了附着力强，纠缠的准晶体线状血小板碳纳米纤维。附着力为10 nm Ta或Ti-W的镍膜。 CNF涂层的厚度约为3.5微米，纤维的直径取决于金属薄膜叠层的组成：Ni / Ta为20-50 nm，Ni / Ti-W为80-125 nm。最终目标是将这些CNF涂层作为微流体装置中的催化剂载体进行整合，为此，控制CNF涂层特性（例如纤维直径，层厚度，比表面积和对表面的附着力）非常重要。

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