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Effects of scratching directions on AFM-based abrasive abrasion process

机译：刮痕方向对基于AFM的磨料磨削过程的影响

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摘要

AFM-based single abrasive abrasion process is widely employed in the surface microanomachining for fabrication of structures at the nanometer scale. The wear depth and roughness are significantly important in the application of these structures. To study effects of scratching directions on the wear depth and roughness within the wear mark, single groove scratching test and wear test on the surface of polished single crystal silicon were carried out using AFM with a pyramidal diamond tip. Single groove scratching tests indicated that tip geometry leads to different removal states such as cutting and plowing. At the same load, deeper wear depth and rougher surface were produced by using the scratching direction perpendicular to the long axis of the cantilever rather than parallel to the long axis of the cantilever. Surface roughness decreases with respect to the feed scratching perpendicular to the long axis of the cantilever, whereas while scratching along the long axis of the cantilever, the surface roughness is rougher at the small feed. This is attributed to the different stiffness of the cantilever along different scratching directions and different removal states between the tip and sample.
机译：基于AFM的单磨料磨蚀工艺已广泛用于表面微加工/纳米加工中，用于制造纳米级结构。磨损深度和粗糙度在这些结构的应用中非常重要。为了研究刮擦方向对磨损深度和磨损痕迹内粗糙度的影响，使用带有锥顶金刚石尖端的AFM进行了单槽刮擦测试和抛光单晶硅表面的磨损测试。单槽刮擦测试表明，刀头的几何形状会导致不同的去除状态，例如切割和翻耕。在相同的载荷下，通过使用垂直于悬臂长轴而不是平行于悬臂长轴的刮擦方向，可以产生更深的磨损深度和更粗糙的表面。相对于垂直于悬臂长轴刮擦的进料，表面粗糙度会降低，而沿着悬臂长轴刮擦的进料，则表面粗糙度在小进料时会更粗糙。这是由于悬臂沿不同的刮擦方向具有不同的刚度以及尖端与样品之间的不同去除状态所致。

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