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首页> 外文期刊>Vakuum in Forschung und Praxis >Pumping speed measurement of turbomolecular pumps by a quasi-stationary pump-down method: a novel method has been tested whose advantages are the fundamental principle, applicability for arbitrary gases, high accuracy, and easiness ofautomatization
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Pumping speed measurement of turbomolecular pumps by a quasi-stationary pump-down method: a novel method has been tested whose advantages are the fundamental principle, applicability for arbitrary gases, high accuracy, and easiness ofautomatization

机译：用准平稳抽空法测量涡轮分子泵的抽速：已经测试了一种新颖的方法，该方法的优点是基本原理，适用于任意气体，精度高且易于自动化

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摘要

The pumping speed of a turbomolecular pump is usually measured by injecting a stationary known gas flow via a standardised test dome into the pump and measuring the equilibrium pressure in the test dome. The ratio of gas throughput and pressure is just the pumping speed. In practice, the pressure can be conveniently and accurately measured, whereas the convenient and accurate throughput measurement is a challenging experimental problem. The present paper reports on a new method for measuring thepumping speed in which the throughput is generated by the pumping down of a vessel via an orifice. From the decrease of vessel pressure with time, and from known vessel volume, the throughput can be directly and accurately derived. Exploring measurementsby the new method in fact give high accuracy, systematical error sources are practically negligible.
机译：涡轮分子泵的泵速通常通过以下方式来测量：通过标准化的测试圆顶将固定的已知气流注入泵中，并测量测试圆顶中的平衡压力。气体通过量与压力之比就是抽速。在实践中，可以方便，准确地测量压力，而方便，准确的吞吐量测量是一个具有挑战性的实验问题。本文报道了一种新的测量泵送速度的方法，其中通过通过孔口将容器抽空产生吞吐量。从容器压力随时间的降低以及已知容器的体积，可以直接而准确地得出产量。使用新方法探索测量结果实际上具有很高的准确性，系统误差源实际上可以忽略不计。

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