Thermal conductivity measurement of submicron-thick aluminium oxide thin films by a transient thermo-reflectance technique

Bai SY; Tang ZA; Huang ZX; Yu J; Wang JQ

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Thermal conductivity measurement of submicron-thick aluminium oxide thin films by a transient thermo-reflectance technique

机译：瞬态热反射技术测量亚微米级氧化铝薄膜的热导率

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Thermal conductivity of submicron-thick aluminium oxide thin Elms prepared by middle frequency magnetron sputtering is measured using a transient thermo-reflectance technique. A three-layer model based on transmission line theory and the genetic algorithm optimization method are employed to obtain the thermal conductivity of thin films and the interfacial thermal resistance. The results show that the average thermal conductivity of 330-1000 nm aluminium oxide thin films is 3.3 Wm(-1)K(-1) at room temperature. No significant thickness dependence is found. The uncertainty of the measurement is less than 10%.

机译：使用瞬态热反射技术测量通过中频磁控溅射制备的亚微米级氧化铝薄Elms的热导率。采用基于传输线理论的三层模型和遗传算法优化方法，获得薄膜的导热系数和界面热阻。结果表明，在室温下330-1000 nm氧化铝薄膜的平均导热率为3.3 Wm（-1）K（-1）。没有发现明显的厚度依赖性。测量的不确定度小于10％。

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《Chinese physics letters》 |2008年第2期|共4页
作者
Bai SY; Tang ZA; Huang ZX; Yu J; Wang JQ;
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正文语种 eng
中图分类物理学;
关键词
DIFFUSIVITY MEASUREMENT; CALORIMETRIC METHOD; DIELECTRIC FILMS; REFLECTIVITY; LAYERS;

机译：扩散率测量;量热法;介电膜;反射率;层数;

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1. Thermal conductivity measurement of submicron-thick aluminium oxide thin films by a transient thermo-reflectance technique [J] . Bai SY, Tang ZA, Huang ZX, Chinese physics letters . 2008,第2期

机译：瞬态热反射技术测量亚微米级氧化铝薄膜的热导率
2. Thermal Conductivity and Interfacial Thermal Resistance: Measurements of Thermally Oxidized SiO₂ Films on a Silicon Wafer Using a Thermo-Reflectance Technique [J] . Ryozo Kato, Ichiro Hatta International Journal of Thermophysics . 2008,第6期

机译：导热系数和界面热阻：使用热反射技术测量硅晶片上热氧化的SiO _{2 膜}
3. Thermal Conductivity and Interfacial Thermal Resistance: Measurements of Thermally Oxidized SiO_2 Films on a Silicon Wafer Using a Thermo-Reflectance Technique [J] . Ryozo Kato, Ichiro Hatta International Journal of Thermophysics . 2008,第6期

机译：导热系数和界面热阻：使用热反射技术测量硅晶片上热氧化的SiO_2膜
4. An Optimized Thermo-Reflectance Technique for Thermal Conductivity Measurements of Thin-Film Electronic Materials [C] . M. G. BURZO, P. L. KOMAROV, P. E. RAAD International Thermal Conductivity conference . 2006

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5. Thermal conductivity measurement of thin film of carbon SWNT using the 3o technique. [D] . Sidorov, Anton Nickolaevich. 2005

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Thermal conductivity measurement of submicron-thick aluminium oxide thin films by a transient thermo-reflectance technique

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