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Magnetic Bingham fluid-assisted deterministic polishing for super-smooth surfaces

机译:磁性宾厄姆流体辅助确定性抛光,用于超光滑表面

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摘要

The characteristics of magnetorheological finishing (MRF) technique such as the behavior of magnetic particles and the magnetic field distribution have been investigated. Based on the established theoretical model, material removal function and removal rate experiments involving a K9 glass mirror are designed and carried out. Farther experiments are carried out to improve the surface roughness of the workpiece. The final surface roughness with an initial value of 17.58 reached 0.4351 nm rms after 35 min of deterministic MRF, the AFM measurements on micro-structures of the polished surface are also improved by 9.445 nm rms without obvious defects.
机译:研究了磁流变精加工(MRF)技术的特性,例如磁性粒子的行为和磁场分布。基于已建立的理论模型,设计并进行了涉及K9玻璃镜的材料去除功能和去除率实验。进行了进一步的实验以改善工件的表面粗糙度。经过35分钟的确定性MRF后,初始值为17.58的最终表面粗糙度达到0.4351 nm rms,在抛光表面的微观结构上进行的AFM测量也提高了9.445 nm rms,而没有明显的缺陷。

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