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A study on solid density primary standard

机译：固体密度基本标准研究

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The accuracy of solid density primary standard is decided mainly by the accuracy of the diameter measurement of silicon sphere. With traditional five-interferogram algorithm to unwrap phase for diameter measurement, the phase steps should be equal topi/2 exactly, but this is almost impossible to achieve in nanometer positioning technique. In order to overcome this defect, we have derived an improved five-interferogram algorithm, which not only keeps the high accuracy of traditional five-interferogram algorithm, but also does not require absolute equal step to unwrap phase. Instead, the improved five-interferogram algorithm only needs measuring phase shifting. Based on the improved algorithm, we have developed a novel interferometer with special etalon, and the cavity length of this etalon can be changed by pressure from vertical direction to realize phase shifting. The accuracy of this Interferometer is better than 3 nm and can be improved in future research.
机译：固体密度基准的精度主要取决于硅球直径测量的精度。使用传统的五干涉图算法展开相位以进行直径测量时，相位步长应精确等于pi / 2，但这在纳米定位技术中几乎是不可能实现的。为了克服这一缺陷，我们提出了一种改进的五干涉图算法，该算法不仅保持了传统的五干涉图算法的高精度，而且不需要绝对相等的步长来展开相位。相反，改进的五干涉图算法仅需要测量相移。在改进算法的基础上，我们开发了一种新型的具有特殊标准具的干涉仪，该标准具的腔长可以通过垂直方向的压力改变而实现相移。该干涉仪的精度优于3 nm，并且可以在未来的研究中加以改进。

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