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A correcting function of the two-dimensional deflection

机译：二维挠度的校正功能

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摘要

The distortion correction of a two-dimensional deflection field controlled by D/A system is an important technology for the beam-microfabrication (for example, electronic beam, photon beam, etc.). The key is to deduce an approximate correcting function. Generally the integer function is used. In a deflection field, not only does the geometry astigmation distortion exist , but also the repeated addition of kinds of distortion formed by unsymmetry of the deflection system exists. Thus the distortion isvery complex and must be corrected. But because of the precise measurability of distortion, we can deduce the correcting function using the subfield digit correcting method according to the principle of curvilinear coordinates mapping and the result measured. The correcting function deduced is a linear divided formula. It has advantages of simple calculation and small error.
机译：由D / A系统控制的二维偏转场的畸变校正是用于束微加工（例如，电子束，光子束等）的重要技术。关键是要得出近似的校正函数。通常，使用整数函数。在偏转场中，不仅存在几何像散畸变，而且还存在由于偏转系统不对称而形成的各种畸变的反复叠加。因此，失真非常复杂，必须予以纠正。但是由于失真的精确可测性，我们可以根据曲线坐标映射的原理和测量结果，采用子场数字校正方法推导校正函数。推导的校正函数是线性除法公式。它具有计算简单，误差小的优点。

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