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Self-consistent calculation of electrostatic force for two kinds of mesoscopic surface structures

机译:两种介观表面结构的静电力的自洽计算

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The scanning electrostatic force microscopy (SEFM) can acquire information of surface structures in a non-contact way. We calculate the electrostatic force between the charged tip and polarized surface structure in SEFM in the framework of self-consistent integral equation formalism (SCIEF), incorporating the image method to treat the electrostatic coupling of substrate and tip. We consider two kinds of surface structures, one is the topographic structure on the surface, the other is the dielectric structure embedded in the substrate. The force pattern of the topographic structure shows a protrusion around the surface structure. However, the force pattern displays a hollow around an embedded structure with a dielectric constant less than that of substrate medium. For an embedded structure with a larger dielectric constant, the force pattern exhibits a protrusion, and the force signal is much weaker than that of the topographic structure. Therefore, it is expected that one may identify these surface structures from the pure electrostatic force information in SEFM. The force signal of the densely arranged dielectric pads is simply the superposition of force signal of each pad individually, the interference effect of electric field is not remarkable.
机译:扫描静电力显微镜(SEFM)可以非接触方式获取表面结构信息。我们在自洽积分方程形式学(SCIEF)的框架内计算SEFM中带电针尖和极化表面结构之间的静电力,并结合图像方法来处理基底和针尖的静电耦合。我们考虑两种表面结构,一种是表面上的地形结构,另一种是嵌入衬底中的介电结构。形貌结构的力图显示出围绕表面结构的突出。但是,力图在嵌入结构周围显示出一个空洞,其介电常数小于基板介质的介电常数。对于具有较大介电常数的嵌入式结构,力图显示出突起,并且力信号比形貌结构的信号弱得多。因此,期望人们可以从SEFM中的纯静电力信息中识别出这些表面结构。密集排列的电介质垫的力信号仅仅是各个垫的力信号的叠加,电场的干扰效果不明显。

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