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首页> 外文期刊>Vacuum: Technology Applications & Ion Physics: The International Journal & Abstracting Service for Vacuum Science & Technology >Fabrication of an array of surface mount device 32.768 kHz quartz tuning fork-type crystals: photolithography and selective etching of an array of quartz tuning fork resonators with subsequent photoresist spray coating
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Fabrication of an array of surface mount device 32.768 kHz quartz tuning fork-type crystals: photolithography and selective etching of an array of quartz tuning fork resonators with subsequent photoresist spray coating

机译：表面安装器件阵列的制造32.768 kHz石英音叉型晶体：光刻和选择性蚀刻石英音叉谐振器阵列，并进行随后的光刻胶喷涂

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摘要

Significant increase in yield of wafer fabrication process for -1degrees X-cut miniature surface mount device (SMD) 32.768 kHz quartz tuning forks was realized by employing positive (subtractive) photolithography, selective etching and subsequent positive (subtractive) photoresist spray coating method. Finite element method (FEM) was used to model optimum tuning fork geometry, tine tip and tine surface electrode shape and thickness with a resonance frequency close to 32.768 kHz and a series resistance value of 50 kOmega) as design targets. Positive (subtractive) photoresist spray coating process was applied subsequent to the positive (subtractive) photolithography and selective etching and it enabled complete definition of surface, side-wall electrodes and interconnections. Tuning fork resonators were further processed for packaging and the semifinished and unsealed tuning forks thus fabricated were evaluated by measuring resonance frequency and series resistance values at 10(-5)Torr of vacuum level. (C) 2002 Elsevier Science Ltd. All rights reserved. [References: 10]
机译：-1度X切割微型表面安装器件（SMD）的32.768 kHz石英音叉的晶片制造工艺的成品率显着提高，这是通过采用正（减法）光刻，选择性蚀刻以及随后的正（减法）光刻胶喷涂方法实现的。使用有限元方法（FEM）对最佳音叉的几何形状，尖齿尖端和尖齿表面电极的形状和厚度进行建模，其谐振频率接近32.768 kHz，串联电阻值为50kΩ。在正（减法）光刻和选择性蚀刻之后应用正（减法）光刻胶喷涂工艺，可以完全定义表面，侧壁电极和互连。进一步处理音叉谐振器以进行包装，并通过在真空水平10（-5）Torr下测量谐振频率和串联电阻值来评估由此制成的半成品和未密封音叉。 （C）2002 Elsevier ScienceLtd。保留所有权利。 [参考：10]

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