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Oriented growth of diamond on (0001) surface of hexagonal GaN

机译:六角形GaN(0001)表面上金刚石的定向生长

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摘要

Oriented growth of diamond has been attempted on hexagonal GaN layers using conventional microwave plasma-assisted chemical vapor deposition (MP-CVD). GaN layers used as a substrate are grown on sapphire substrates by metal organic themical vapor deposition (MO-CVD). Carburization, bias-enhanced nucleation and crystal growth processes are successively carried out. Oriented growth of diamond grains is demonstrated by the scanning electron microscopic image. It is suggested that an X-ray diffraction signal detected at 2θ = 43.9°is due to the (111) face of diamond. Moreover, a Raman signal which peaked at 1333 cm~(-1) supports the growth of diamond.
机译:已经尝试使用常规微波等离子体辅助化学气相沉积(MP-CVD)在六角形GaN层上定向生长金刚石。通过金属有机介电气相沉积(MO-CVD)在蓝宝石衬底上生长用作衬底的GaN层。依次进行渗碳,偏置增强形核和晶体生长过程。扫描电子显微镜图像证明了金刚石晶粒的定向生长。建议在2θ= 43.9°处检测到的X射线衍射信号是由于金刚石的(111)面引起的。此外,在1333 cm〜(-1)处达到峰值的拉曼信号支持钻石的生长。

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