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Direct current cathodic glow discharge polymerization of methane and butane

机译:甲烷和丁烷的直流阴极辉光放电聚合

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The deposition of a polymeric material on the surface of the cathode of a direct current (dc) glow discharge was investigated for methane and butane. The cathode region of a de glow discharge is not a plasma in a strict sense. Consequently, the deposition of a polymeric material to the cathode surface differs significantly from so-called plasma polymerization of the same monomer (starting gas or vapor) that deposits on a substrate placed in a glow discharge plasma. Using methane and n-butane, the influence of the molecular weight of the monomer (M), volume flow rate, and discharge power on the deposition rate in a de glow discharge were investigated and compared with those in an audio frequency and a radio frequency glow discharge. It was found that the deposition rate expressed in (thickness growth rate)/(M) is linearly proportional to the current density, which implies that cathodic polymerization is controlled by the cathode region parameter (not plasma parameters). The refractive indices (632.8 nm) for the cathodic polymers are in the range of 2.2-2.4 while those for plasma polymers are in the range of 1.5-1.7. (C) 1998 John Wiley & Sons, Inc. [References: 13]
机译:对于甲烷和丁烷,研究了在直流(dc)辉光放电阴极表面上聚合材料的沉积。从严格意义上讲,辉光放电的阴极区域不是等离子体。因此,聚合物材料在阴极表面的沉积与沉积在辉光放电等离子体中的基板上沉积的相同单体(原料气体或蒸气)的所谓等离子体聚合显着不同。使用甲烷和正丁烷,研究了单体的分子量(M),体积流量和放电功率对辉光放电中沉积速率的影响,并将其与音频和射频的影响进行了比较辉光放电。发现以(厚度生长速率)/(M)表示的沉积速率与电流密度成线性比例,这意味着阴极聚合由阴极区域参数(不是等离子体参数)控制。阴极聚合物的折射率(632.8 nm)在2.2-2.4的范围内,而等离子体聚合物的折射率在1.5-1.7的范围内。 (C)1998 John Wiley&Sons,Inc. [参考:13]

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