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首页> 外文期刊>Journal of mass spectrometry: JMS >Surface effects on the diagnostic of carbon/ nitrogen low-pressure plasmas studied by differentially pumped mass spectrometry
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Surface effects on the diagnostic of carbon/ nitrogen low-pressure plasmas studied by differentially pumped mass spectrometry

机译：差动泵质谱法研究碳/氮低压等离子体诊断的表面效应

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摘要

In this work, the characterization of the species produced in reactive plasmas by differentially pumped mass spectrometry is addressed. A H_2/CH_4/N_2 mixture (90: 5: 5) was fed into a direct current glow discharge and analysed by conventional and cryotrap assisted mass spectrometry. The gaseous mixture was chosen because of its particular relevance in the inhibition of tritiumrich carbon filmdeposition in fusion plasmas (scavenger technique) and in the deposition of amorphous hydrogenated carbon films by plasma-assisted chemical vapour deposition. Important changes in the composition of the detected species upon surface modification of the reactor walls (stainless steel or covered by an amorphous hydrogenated carbon layer) or in the way they are sampled (length and spatial configuration of the stainless steel duct) were detected. They are analysed in terms of radical formation and recombination on the reactor walls or into the sampling duct, thus providing some insight into the underlying chemistry. In general, when the reactorwalls are covered by an amorphous hydrogenated carbon layer,more hydrocarbons are produced, but the radical production is lower and seem to be less reactive than in stainless steel. Also, two sources of oxygen contamination in the plasma have been identified, from the native oxide layer in stainless steel and from unintended water contamination in the chamber, which modify considerably the detected species.
机译：在这项工作中，解决了通过差分泵质谱在反应等离子体中产生的物质的表征。将H_2 / CH_4 / N_2混合物（90：5：5）送入直流辉光放电，并通过常规和低温阱辅助质谱法进行分析。选择气态混合物是因为其在熔融等离子体中抑制富rich碳膜沉积（清除剂技术）以及通过等离子体辅助化学气相沉积法沉积无定形氢化碳膜方面具有特殊意义。检测到反应堆壁（不锈钢或被无定形氢化碳层覆盖）表面改性后，或以其采样方式（不锈钢管的长度和空间配置）检测到的物质组成的重要变化。根据反应器壁或进样管中自由基的形成和重组对它们进行了分析，从而提供了对基础化学物质的一些了解。通常，当反应堆壁被无定形的氢化碳层覆盖时，会产生更多的碳氢化合物，但与不锈钢相比，自由基的生成量较低且反应性似乎较低。同样，从不锈钢中的天然氧化物层和室内意外的水污染中，可以识别出等离子体中氧污染的两种来源，这大大改变了检测到的物质。

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