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Novel Sensor Fabrication Using Direct-Write Thermal Spray and Precision Laser Micromachining

机译:使用直写式热喷涂和精密激光微加工的新型传感器制造

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摘要

This work presents a direct-write technique for rapid prototyping and manufacturing of sensors onto structural and functional components for many diverse applications. The technique combines thermal spray (an additive process), which produces blanket depositions of films and coatings, with ultrafast laser micromachining (a subtractive process) to produce functional sensors. Microheaters and strain gauges have been successfully fabricated in this work to demonstrate the feasibility and advantages of the proposed technique. Electrical and thermal characterization of the sensors is also performed. With minor modifications to the pattern design and processing procedures, additional sensing structures and electronic components, for example, precision resistors and interdigitated capacitors, can be fabricated using the presented technique.
机译:这项工作提出了一种直接写入技术,可将传感器快速原型化并制造到结构和功能组件上,以用于许多不同的应用。该技术结合了热喷涂(增材制造工艺)和超快激光微加工(减成工艺)技术,该功能可产生薄膜和涂层的均匀沉积,从而产生功能性传感器。微型加热器和应变仪已在这项工作中成功制造,以证明所提出技术的可行性和优势。还执行传感器的电气和热特性分析。在对图案设计和处理程序进行较小修改的情况下,可以使用本文介绍的技术来制造其他感应结构和电子组件,例如精密电阻器和叉指电容器。

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