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首页> 外文期刊>Journal of manufacturing science and engineering: Transactions of the ASME >A Porous-Restricted Aerostatic Lead Screw Actuator for High Performance Microscale Machine Tools
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A Porous-Restricted Aerostatic Lead Screw Actuator for High Performance Microscale Machine Tools

机译：高性能微型机床用多孔限制气动静力丝杠致动器

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摘要

The design and manufacturing process for a porous-restricted aerostatic lead screw actuator (ALSA) is presented. The ALSA provides near-frictionless motion with submicron positioning accuracy, high stiffness at low inlet air pressures (<827 kPa), and a travel length of 50 mm. Porous graphite disk inserts are held in a helical pattern in an aerostatic nut housing against a lead screw thread to create multiple simultaneous air bearing surfaces. A wave spring flexure is inserted behind each graphite disk to provide a preload and ensure full contact between the porous graphite disk surface and the lead screw flank. When the wave spring flexures and graphite disks are potted in combination with a slow-curing epoxy, this creates a self-aligning method to consistently match all graphite disk insert surfaces to the helical profile of the lead screw thread. Experimental trials were performed to evaluate the performance of the manufactured ALSA. It was found that a stable nut with a per-thread stiffness of 9.7 N/mu m was achievable with a 3.5 mum air gap and an overall permeability of 5.4 x 10~15 m2. Applications requiring higher stiffness may couple two or more single-threaded nuts to achieve the desired actuator stiffness.
机译：介绍了一种多孔受限的空气静力丝杠致动器（ALSA）的设计和制造过程。 ALSA提供近乎无摩擦的运动，具有亚微米级的定位精度，在低进气压力（<827 kPa）下具有很高的刚度，并且行程长度为50 mm。多孔石墨圆盘插件以螺旋形式固定在空气静力螺母壳体中，紧靠丝杠螺纹，以形成多个同时的气浮表面。在每个石墨盘后面插入一个波形弹簧挠曲件，以提供预紧力并确保多孔石墨盘表面与丝杠齿腹之间完全接触。当波形弹簧挠曲件和石墨盘与慢固化环氧树脂一起灌封时，这将创建一种自对准方法，以使所有石墨盘插入件表面始终与丝杠的螺旋形轮廓匹配。进行实验试验以评估所制造的ALSA的性能。结果发现，在3.5 m的气隙和5.4 x 10〜15 m2的总磁导率的情况下，可以获得稳定的螺母，其每螺纹刚度为9.7 N /μm。需要更高刚度的应用可以将两个或多个单螺纹螺母连接起来，以达到所需的执行器刚度。

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