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首页> 外文期刊>Journal of Mechanical Science and Technology >Development of digital lithography masking method with focusing mechanism for fabrication of micro-feature on biomachining process
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Development of digital lithography masking method with focusing mechanism for fabrication of micro-feature on biomachining process

机译：具有聚焦机制的数字光刻掩膜方法的发展，用于在生物加工工艺中制造微特征

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摘要

An alternative method is developed to remove metal from a work piece by combining a digital lithography system with biomachining. The purpose of this system is to obtain extra advantages as compared to conventional micro-fabrication processes currently used in practice. The use of microorganisms as a cutting tool in biomachining can eliminate the use of hazardous chemical materials, and the target surface is not affected by heat as a result of machining. The proposed process has a low material removal rate, but with less energy consumption. The greatest advantage is that the tools used in biomachining can be cultured continuously; i.e., they are renewable. Theoretically, the resolution of biomachining can reach 1 um due to the size of the bacteria. To achieve selective material removal, we combine the biomachining process with a polymer mask generated by a digital lithography (DL) system. In order to minimize errors and noise, the DL system was constructed by choosing robust and commonly available devices for most of the sub-tasks. This construction then can bring projected image onto work piece surface on fully controlled.
机译：通过将数字光刻系统与生物机械加工相结合，开发了一种从工件上去除金属的替代方法。与当前实际使用的常规微制造工艺相比，该系统的目的是获得额外的优势。在生物加工中使用微生物作为切削工具可以消除有害化学材料的使用，并且加工不会使目标表面受热影响。所提出的方法具有较低的材料去除率，但是具有较少的能量消耗。最大的优点是可以连续培养用于生物加工的工具;即它们是可再生的。从理论上讲，由于细菌的大小，生物加工的分辨率可以达到1 um。为了实现选择性材料去除，我们将生物加工工艺与由数字光刻（DL）系统生成的聚合物掩膜结合在一起。为了使错误和噪声最小化，通过为大多数子任务选择功能强大且通用的设备来构建DL系统。然后，这种结构可以将投影图像完全控制在工件表面上。

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