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首页> 外文期刊>Journal of Mechanical Science and Technology >The Influences of Residual Stress on the Frequency of Ultrasonic Transducers with Composite Membrane Structure
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The Influences of Residual Stress on the Frequency of Ultrasonic Transducers with Composite Membrane Structure

机译：残余应力对复合膜结构超声换能器频率的影响

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摘要

Arrayed ultrasonic sensors based on the piezoelectric thin film (lead-zirconate-titanate: Pb (Zr{sub}0.52Ti{sub}0.48) O{sub}3) having composite membrane structure are fabricated. Different thermal and elastic characteristics of each -layer generate the residual stress during the high temperature deposition processes, accomplished diaphragm is consequently bowing. We present the membrane deflection effects originated from the residual stress on the resonant frequencies of the sensor chips. The resonant frequencies (f{sub}r) measured of each sensor structures are located in the range of 87.6～111 kHz, these are larger 30-40 kHz than the resultant frequencies of FEM. The primary factors of f{sub}r deviations from the ideal FEM results are the membrane deflections, and the influence of stiffness variations are not so large on that. Membrane deflections have the effect of total thickness increase which sensitively change the f{sub}r to the positive direction. Stress generations of the membrane are also numerically predicted for considering the effect of stiffness variations on the f{sub}r.
机译：制造具有复合膜结构的基于压电薄膜的阵列式超声波传感器（锆钛酸铅：Pb（Zr {sub} 0.52Ti {sub} 0.48）O {sub} 3）。每层的不同热和弹性特性会在高温沉积过程中产生残余应力，因此完成的隔膜会弯曲。我们介绍了膜变形效应，其起因于传感器芯片共振频率上的残余应力。每个传感器结构测得的共振频率（f {sub} r）在87.6〜111 kHz范围内，比FEM的合成频率大30-40 kHz。偏离理想FEM结果的主要因素是薄膜挠度，而刚度变化的影响并不大。膜的挠曲具有总厚度增加的作用，从而使f {sub} r敏感地改变为正方向。考虑到刚度变化对f {sub} r的影响，还可以通过数值预测膜的应力生成。

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