Patterning Flexible Substrates Using Surface Relief Structures in Azobenzene Functionalized Polymer Films

SUIZHOU YANG; KE YANG; ALOKE JAIN; RAMASWAMY NAGARAJAN; JAYANT KUMAR

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Patterning Flexible Substrates Using Surface Relief Structures in Azobenzene Functionalized Polymer Films

机译：使用偶氮苯官能化聚合物薄膜中的表面浮雕结构对柔性基板进行图案化

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摘要

A novel method for maskless micro-patterning of polymeric substrates is presented. First, an azobenzene functionalized polymer film is spin-coated on a Poly (ethylene terephthalate) (PET) sheet. Then surface relief structures are optically inscribed on the polymer film by interference of laser beams. The patterned azobenzene functionalized film is then etched in the plasma chamber such that the gratings are transferred to the PET substrate. Finally, any remaining azobenzene functionalized polymer is dissolved away using an appropriate solvent. This method of patterning can be broadly applied to a variety of flexible/polymeric substrates and the resolution is not limited by the substrate thermo-mechanical properties.

机译：提出了一种新的方法，用于无掩模的聚合物基板微图案化。首先，将偶氮苯官能化的聚合物薄膜旋涂在聚对苯二甲酸乙二醇酯（PET）片上。然后通过激光束的干涉将表面浮雕结构光学地刻在聚合物膜上。然后在等离子室中蚀刻图案化的偶氮苯官能化膜，从而将光栅转移到PET基板上。最后，使用适当的溶剂将任何残留的偶氮苯官能化的聚合物溶解掉。这种图案化方法可以广泛地应用于各种柔性/聚合物基板，并且分辨率不受基板的热机械性能的限制。

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《Journal of Macromolecular Science. Pure and Applied Chemistry》 |2008年第12期|共4页
作者
SUIZHOU YANG; KE YANG; ALOKE JAIN; RAMASWAMY NAGARAJAN; JAYANT KUMAR;
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正文语种 eng
中图分类高分子化学（高聚物）;
关键词
Maskless micro-patterning of plastics; azobenzene functionalized polymers; surface relief structures; optically induced grating; etching;

机译：塑料无掩模微图案化;偶氮苯官能化聚合物;表面起伏结构;光致光栅;蚀刻;

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专利

1. Patterning flexible substrates using surface relief structures in azobenzene functionalized polymer films [J] . Yang SZ, Yang K, Jain A, Journal of Macromolecular Science. Pure and Applied Chemistry . 2008,第11期

机译：在偶氮苯官能化的聚合物薄膜中使用表面浮雕结构对柔性基板进行图案化
2. Patterning Flexible Substrates Using Surface Relief Structures in Azobenzene Functionalized Polymer Films [J] . SUIZHOU YANG, KE YANG, ALOKE JAIN, Journal of Macromolecular Science. Pure and Applied Chemistry . 2008,第10a12期

机译：使用偶氮苯官能化聚合物薄膜中的表面浮雕结构对柔性基板进行图案化
3. Patterning of Substrates Using Surface Relief Structures on an Azobenzene-Functionalized Polymer Film [J] . Suizhou Yang, Ke Yang, Langang Niu, Advanced Materials . 2004,第8期

机译：使用偶氮苯官能化聚合物薄膜上的表面浮雕结构对基板进行构图
4. Photofabrication of surface relief gratings on azobenzene polymer films [C] . Dong-Yu Kim, Univ. of Massachusetts/Lowell, Lowell, Photosensitive Optical Materials and Devices . 1997

机译：在偶氮苯聚合物薄膜上的表面浮雕光栅的光加工
5. Surface Relief Grating on Thin Film Containing Azobenzene-Polymer Material Linked by Hydrogen-Bonding [D] . Al Atmah, Nadiyah Rashed. 2018

机译：含有氢键连接的偶氮苯 - 聚合物材料的薄膜上的表面浮雕光栅
6. Nano-Imprinted Thin Films of Reactive Azlactone-Containing Polymers: Combining Methods for the Topographic Patterning of Cell Substrates with Opportunities for Facile Post-Fabrication Chemical Functionalization [O] . Nathaniel J. Fredin, Adam H. Broderick, Maren E. Buck, -1

机译：活性的纳米印制的薄膜吖内酯 - 含氯聚合物：结合的细胞基质的地形图案与机遇简易后期制作化学功能方法
7. Photoinduced fabrication of complex surface relief structures on azobenzene functionalized polymers [O] . J Kumar, L Li, Nirmal K Viswanathan, 1999

机译：偶氮苯官能化聚合物对复合表面浮雕结构的光诱导

Patterning Flexible Substrates Using Surface Relief Structures in Azobenzene Functionalized Polymer Films

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