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首页> 外文期刊>Journal of micro and nano manufacturing >Vacuum Venting Enhances the Replication of Nano/Microfeatures in Micro-Injection Molding Process
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Vacuum Venting Enhances the Replication of Nano/Microfeatures in Micro-Injection Molding Process

机译：真空排气增强了微注射成型工艺中纳米/微特征的复制

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摘要

Vacuum venting is a method proposed to improve feature replication in microparts that are fabricated using micro-injection molding (MIM). A qualitative and quantitative study has been carried out to investigate the effect of vacuum venting on the nano/microfeature replication in MIM. Anodized aluminum oxide (AAO) containing nanofeatures and a bulk metallic glass (BMG) tool mold containing microfeatures were used as mold inserts. The effect of vacuum pressure at constant vacuum time, and of vacuum time at constant vacuum pressure on the replication of these features is investigated. It is found that vacuum venting qualitatively enhances the nanoscale feature definition as well as increases the area of feature replication. In the quantitative study, higher aspect ratio (AR) features can be replicated more effectively using vacuum venting. Increasing both vacuum pressure and vacuum time are found to improve the depth of replication, with the vacuum pressure having more influence. Feature orientation and final sample shape could affect the absolute depth of replication of a particular feature within the sample.
机译：真空排气是一种建议的方法，可以改善使用微注射成型（MIM）制成的微零件中的特征复制。已经进行了定性和定量研究，以研究真空排气对MIM中纳米/微观特征复制的影响。包含纳米特征的阳极氧化铝（AAO）和包含微观特征的块状金属玻璃（BMG）工具模具被用作模具嵌件。研究了在恒定真空时间的真空压力和恒定真空压力的真空时间对这些特征的复制的影响。发现真空排气在质量上增强了纳米级特征定义并增加了特征复制的面积。在定量研究中，可以使用真空排气更有效地复制较高的纵横比（AR）特征。发现增加真空压力和真空时间都可以改善复制深度，而真空压力的影响更大。特征方向和最终样品形状可能会影响样品中特定特征的绝对复制深度。

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