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首页> 外文期刊>Journal of nanoscience and nanotechnology >Focused-Ion-Beam Induced Nano Feature Self-Assembly on Glassy Carbon
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Focused-Ion-Beam Induced Nano Feature Self-Assembly on Glassy Carbon

机译：聚焦离子束在玻璃碳上诱导的纳米特征自组装

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摘要

Glassy carbon is an advanced non-graphitizing carbon material with many unique properties. This work explores the surface modification and machining characteristics of glassy carbon when subject to a Focused Ion Beam (FIB) over a range of incident angles. A FIB system delivering a 30 keV Ga~+ ion beam was used to irradiate the surface of polished glassy carbon substrates. On irradiation at incident angles less 40°, the surface is smooth and uniform. Nano particle deposits were observed on the irradiated floor and sidewalls after prolonged irradiation. With incident angles over 40°, the irradiated area exhibits nano-scale patterns in the form of ripples, steps and columnar features. The evolution of these structures increases with the incident angle. The orientation of the nano features changes from parallel to perpendicular with respect to the direction of propagation of the ion beam. Although the simultaneous formation of nano features could be problematic for applications such as ion milling or polishing, they offer an effective means of developing nano-scale surface modification at the point of irradiation. Possible applications are discussed.
机译：玻碳是一种具有许多独特性能的高级非石墨化碳材料。这项工作探索了在一定入射角范围内受到聚焦离子束（FIB）时玻璃碳的表面改性和机械加工特性。使用传送30 keV Ga〜+离子束的FIB系统辐照抛光的玻璃碳基底的表面。以小于40°的入射角照射时，表面光滑且均匀。长时间辐照后，在被辐照的地板和侧壁上观察到纳米颗粒沉积物。当入射角超过40°时，受辐照的区域将以波纹，台阶和柱状特征的形式呈现出纳米级图案。这些结构的演变随入射角的增加而增加。纳米特征的取向相对于离子束的传播方向从平行变为垂直。尽管纳米特征的同时形成对于诸如离子铣削或抛光的应用可能是有问题的，但是它们提供了在辐照点上发展纳米级表面改性的有效手段。讨论了可能的应用。

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