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Nanoindentation Behavior of Nanolayered Metal-Ceramic Composites

机译:纳米层金属陶瓷复合材料的纳米压痕行为

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摘要

Small-length scale multilayered structures are attractive materials due to their extremely high strength and flexibility, relative to conventional laminated composites. In this study, nanolayered laminated composites of Al and SiC were synthesized by DC/RF magnetron sputtering. The microstructure of the multilayered structures was characterized, and the mechanical properties measured by nanoindentation testing. The influence of layer thickness on Young's modulus and hardness of individual and multilayers was quantified. An analytical model was used to subtract the contribution of the Si substrate, to extract the true modulus of the films.
机译:与传统的层压复合材料相比,小尺寸的多层结构由于具有极高的强度和柔韧性而成为有吸引力的材料。在这项研究中,通过DC / RF磁控溅射合成了Al和SiC的纳米层状复合材料。表征了多层结构的微观结构,并通过纳米压痕测试测量了机械性能。量化了层厚度对单个和多层的杨氏模量和硬度的影响。使用分析模型减去硅衬底的贡献,以提取薄膜的真实模量。

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