Fracture Toughness and Adhesion of Transparent Al:ZnO Films Deposited on Glass Substrates

Xiaolu Pang; Hongjian Ma; Kewei Gao; Huisheng Yang; Xiaolei Wu; Alex A. Volinsky

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Fracture Toughness and Adhesion of Transparent Al:ZnO Films Deposited on Glass Substrates

机译：沉积在玻璃基板上的透明Al：ZnO薄膜的断裂韧性和附着力

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Al-doped zinc oxide films (AZO) of different thicknesses were deposited by reactive magnetron sputtering on glass substrates. Fracture toughness and adhesion of transparent AZO films were measured by indentation in air and water. Fracture toughness of glass is about 0.63 MPa·m~(1/2). Under the same normal load, radial crack length shortened with the increase of AZO film thickness. When indented under deionized water, cracks in both glass and AZO films got longer, signifying corresponding decrease in the fracture toughness.

机译：通过反应磁控溅射在玻璃基板上沉积不同厚度的铝掺杂氧化锌膜（AZO）。通过在空气和水中的压痕来测量透明AZO膜的断裂韧性和粘合性。玻璃的断裂韧性约为0.63 MPa·m〜（1/2）。在相同的法向载荷下，随着AZO膜厚度的增加，径向裂纹长度缩短。当在去离子水中压入时，玻璃和AZO膜的裂纹都变长，表明断裂韧性相应降低。

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《Journal of Materials Engineering and Performance》 |2013年第10期|共7页
作者
Xiaolu Pang; Hongjian Ma; Kewei Gao; Huisheng Yang; Xiaolei Wu; Alex A. Volinsky;
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正文语种 eng
中图分类金属学与金属工艺;工程材料学;
关键词
Adhesion; AZO; Fracture toughness; Transparent films; Water;

机译：附着力;AZO;断裂韧性;透明膜;水;

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1. Fracture Toughness and Adhesion of Transparent Al:ZnO Films Deposited on Glass Substrates [J] . Xiaolu Pang, Hongjian Ma, Kewei Gao, Journal of Materials Engineering and Performance . 2013,第10期

机译：沉积在玻璃基板上的透明Al：ZnO薄膜的断裂韧性和附着力
2. Al:ZnO films deposited on flexible transparent polyimide substrate by magnetron sputtering at different substrate temperatures [J] . Optoelectronics and Advanced Materials-Rapid Communications . 2012,第2012期

机译：在不同衬底温度下通过磁控溅射在柔性透明聚酰亚胺衬底上沉积Al：ZnO膜
3. Effects of Substrate Temperature on Properties for Transparent Conducting ZnO: Al Films on Organic Substrate Deposited by r. f. Sputtering [J] . Deheng Zhang, Dejun Zhang, Qingpu Wang Journal of Materials Science & Technology . 2001,第5期

机译：衬底温度对r沉积有机衬底上ZnO：Al透明导电膜性能的影响。 F。溅镀
4. ELECTROCHEMICALLY DEPOSITED NANOSTRICTURED ZnO FILMS ON CONDUCTIVE ZnO:Al/Ag/ZnO:Al STACK GLASS/SUBSTRATES [C] . M. Petrov, K. Lovchinov, M. Ganchev, European Photovoltaic Solar Energy Conference and Exhibition . 2013

机译：导电性ZnO：Al / Ag / ZnO：Al叠层玻璃/基体上的电化学沉积纳米ZnO膜
5. Characterization of Indium Zinc Oxide, Indium Tin Oxide, and Molybdenum Thin Films on Flexible Glass Substrates Deposited via Roll-to-roll Sputter Deposition Processes [D] . Bezama, Christian. 2019

机译：通过轧制溅射沉积工艺沉积在柔性玻璃基板上的氧化铟锌，氧化铟锡和钼薄膜的表征
6. Characteristics of Carrier Transport and Crystallographic Orientation Distribution of Transparent Conductive Al-Doped ZnO Polycrystalline Films Deposited by Radio-Frequency Direct-Current and Radio-Frequency-Superimposed Direct-Current Magnetron Sputtering [O] . Junichi Nomoto, Katsuhiko Inaba, Shintaro Kobayashi, 2017

机译：射频直流和射频叠加直流磁控溅射沉积的透明导电掺铝ZnO多晶薄膜的载流子输运和晶体学取向特征
7. Fracture Toughness and Adhesion of Transparent Al:ZnO Films Deposited on Glass Substrates [O] . Xiaolu Pang, Hongjian Ma, Kewei Gao, 2013

机译：玻璃基板上沉积al：ZnO薄膜的断裂韧性和粘附性

Fracture Toughness and Adhesion of Transparent Al:ZnO Films Deposited on Glass Substrates

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