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首页> 外文期刊>Journal of Materials Engineering and Performance >Surface characterization methods-XPS, TOF-SIMS, and SAM a complimentary ensemble of tools
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Surface characterization methods-XPS, TOF-SIMS, and SAM a complimentary ensemble of tools

机译：表面表征方法-XPS，TOF-SIMS和SAM是工具的互补集合

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摘要

X-ray photoelectron spectroscopy (XPS), time-of-flight secondary ion mass spectrometry (TOF- SIMS), and scanning auger microscopy (SAM) analytical techniques have played important roles in the characterization of the surface and the interfacialchemistry governing properties and performance of materials, and material interfaces. These techniques afford spatially resolved elemental and molecular analysis of the topmost atomic layers of solid surfaces and interfaces. Currently availableinstrumentation provides qualitative/quantitative analysis on molecularly complex materials with detection limits in the parts-per-billion (ppb) range and spatial resolutions approaching 30 nm. Each technique is unique in the information attained,therefore necessitating a multitechnique approach to achieve a complete surface characterization. Examples of coating/interfacial characterization by XPS, TOF-SIMS, and SAM are presented illustrating the functionality of these tools and the complimentarynatures of them.
机译：X射线光电子能谱（XPS），飞行时间二次离子质谱（TOF-SIMS）和扫描螺旋显微镜（SAM）分析技术在表面表征和界面化学支配性质和性能方面发挥了重要作用材料和材料界面。这些技术提供了空间解析的固体表面和界面最顶层原子层的元素和分子分析。当前可用的仪器提供了对分子复杂材料的定性/定量分析，其检测极限在十亿分之一（ppb）范围内，空间分辨率接近30 nm。每种技术在获得的信息中都是唯一的，因此必须采用多种技术方法才能实现完整的表面表征。给出了通过XPS，TOF-SIMS和SAM进行涂层/界面表征的示例，这些示例说明了这些工具的功能及其互补性质。

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