Atomic structure and short- and medium-range order parameters in amorphous chalcogenide films prepared by different methods

Sh.Sh. Sarsembinov; O.Yu. Prikhodko; A.P. Ryaguzov; S.Ya. Maksimova; V.Zh. Ushanov

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Atomic structure and short- and medium-range order parameters in amorphous chalcogenide films prepared by different methods

机译：不同方法制备的非晶硫族化物薄膜的原子结构和中短程参数

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The atomic structure of amorphous As2Se3 and As2S3 films prepared by thermal evaporation in a vacuum and by RF ion-plasma sputtering has been studied by the methods of X-ray diffraction and Raman spectroscopy. The techniques of film preparation had different conditions of substance vaporization and atom condensation on a substrate. It has been established that films prepared by these methods have significant differences in the dimensions of the medium-range order and in the local atomic structure, which causes considerable differences in their electronic properties.

机译：通过X射线衍射和拉曼光谱法研究了通过真空热蒸发和RF离子等离子体溅射制备的非晶态As2Se3和As2S3薄膜的原子结构。薄膜制备技术在基材上具有不同的物质汽化和原子凝聚条件。已经确定，通过这些方法制备的膜在中程级的尺寸和局部原子结构上具有显着的差异，这导致其电子性质的显着差异。

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《Journal of Non-Crystalline Solids: A Journal Devoted to Oxide, Halide, Chalcogenide and Metallic Glasses, Amorphous Semiconductors, Non-Crystalline Films, Glass-Ceramics and Glassy Composites》 |2007年第21期|共5页
作者
Sh.Sh. Sarsembinov; O.Yu. Prikhodko; A.P. Ryaguzov; S.Ya. Maksimova; V.Zh. Ushanov;
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正文语种 eng
中图分类晶体学;
关键词
X-ray diffraction; Raman spectroscopy; Medium-range order; Short-range order;

机译：X射线衍射;拉曼光谱;中程级;短程级;

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1. Atomic structure and short- and medium-range order parameters in amorphous chalcogenide films prepared by different methods [J] . Sh.Sh. Sarsembinov, O.Yu. Prikhodko, A.P. Ryaguzov, Journal of Non-Crystalline Solids: A Journal Devoted to Oxide, Halide, Chalcogenide and Metallic Glasses, Amorphous Semiconductors, Non-Crystalline Films, Glass-Ceramics and Glassy Composites . 2007,第18a21期

机译：不同方法制备的非晶硫族化物薄膜的原子结构和中短程参数
2. Correlation between medium-range order in atomic structure and optical properties of amorphous AsSe films [J] . Sh Sh Sarsembillov, O Yu Prikhodko, A P Ryaguzov Semiconductor science and technology . 2001,第8期

机译：原子结构中程序与非晶态AsSe薄膜光学性质的相关性
3. THE EFFECT OF THE DEPOSITION METHOD ON THE MORPHOLOGY, STRUCTURE, REFRACTIVE-INDEX DISPERSION AND OPTICAL ABSORPTION OF As-BASED AMORPHOUS CHALCOGENIDE FILMS [J] . E. MARQUEZ, J. M. GONZALEZ-LEAL International journal of materials engineering and technology . 2011,第1期

机译：沉积方法对非晶态硫族硫化物薄膜的形貌，结构，折射率分布和光吸收的影响
4. Eu~(3+) as optical probe of the structure in amorphous and nanocry stalline TiO_2 films prepared by sol-gel method [C] . J. A. Garcia-Macedo, G. Valverde-Aguilar, S. Flores-Duran Nanophotonic materials VII . 2010

机译：用Eu〜（3+）作为光学探针研究溶胶-凝胶法制备的非晶态和纳米晶的TiO_2薄膜的结构
5. Characterization of Atomic Structure, Relaxation and Phase Transformation Mechanisms in Bulk and Thin Film Amorphous Chalcogenides and Gallium Antimonide. [D] . Edwards, Trenton Gerard. 2014

机译：体和薄膜非晶硫族化物和锑化镓中原子结构，弛豫和相变机理的表征。
6. The Effects of Precursor C2H2 Fraction on Microstructure and Properties of Amorphous Carbon Composite Films Containing Si and Ag Prepared by Magnetron Sputtering Deposition [O] . Xiaoqiang Liu, Junying Hao, Yongjun Lv, 2019

机译：前驱体C2H2分数对磁控溅射沉积制备的含Si和Ag的非晶碳复合膜的组织和性能的影响
7. Unexpected short- and medium-range atomic structure of sputtered amorphous silicon upon thermal annealing [O] . B. Haberl, S. N. Bogle, T. Li, 2011

机译：热退火时溅射无定形硅的意外的短和中等原子结构

Atomic structure and short- and medium-range order parameters in amorphous chalcogenide films prepared by different methods

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