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Electrical properties of TiO2 thin films

机译:TiO2薄膜的电性能

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摘要

The electrical properties of n-type titanium dioxide thin films deposited by magnetron-sputtering method have been investigated by temperature-dependent conductivity. We observed that the temperature dependence of the electrical conductivity of titanium dioxide films exhibits a crossover from T-1/4 to T-1/2 dependence in the temperature range between 80 and 110 K. Characteristic parameters describing conductivity, such as the characteristic temperature (T-0). hopping distance (R-hop), average hopping energy (Delta(hop)), Coulomb gap (Delta(C)), localization length (xi) and density of states (N(E-F)), were determined, and their values were discussed within the models describing conductivity in TiO2 thin films.
机译:通过与温度有关的电导率研究了磁控溅射法沉积的n型二氧化钛薄膜的电学性能。我们观察到,在80至110 K的温度范围内,二氧化钛薄膜电导率的温度依赖性呈现出从T-1 / 4到T-1 / 2的交叉关系。描述电导率的特征参数,例如特征温度(T-0)。确定了跳跃距离(R-hop),平均跳跃能量(Delta(hop)),库仑间隙(Delta(C)),定位长度(xi)和状态密度(N(EF)),它们的值为在描述TiO2薄膜电导率的模型中进行了讨论。

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