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首页> 外文期刊>Journal of Non-Crystalline Solids: A Journal Devoted to Oxide, Halide, Chalcogenide and Metallic Glasses, Amorphous Semiconductors, Non-Crystalline Films, Glass-Ceramics and Glassy Composites >TiO2 thin films as sensing gas materials
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TiO2 thin films as sensing gas materials

机译：TiO2薄膜作为传感气体材料

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摘要

TiO2 thin films were prepared by DC reactive magnetron sputtering on heated Si, quartz and glass substrates using O-2 and water vapor as reactive gases. The percentage of anatase and rutile as well as the grain size strongly depend on the deposition conditions, as revealed by X-ray diffraction patterns. The films deposited on Si substrates are pure rutile, while a mixed anatase/rutile structure occurs in the films deposited on glass and quartz substrates. Smaller grain rutile and anatase films were prepared in a water vapor atmosphere, in contrast to the films grown in oxygen. The former choice considerably increases the sensing properties of titanium dioxide films. The gas sensitivity was investigated for some reducing gases (methane, acetone, ethanol and liquefied petroleum gas) and the optimum operating temperatures were found. (C) 2008 Elsevier B.V. All rights reserved.
机译：使用O-2和水蒸气作为反应气体，在加热的Si，石英和玻璃基板上通过DC反应磁控溅射制备TiO2薄膜。 X射线衍射图显示，锐钛矿和金红石的百分比以及晶粒大小强烈取决于沉积条件。沉积在Si基板上的薄膜是纯金红石型，而在玻璃和石英基板上沉积的薄膜中出现了锐钛矿/金红石混合结构。与在氧气中生长的薄膜相反，在水蒸气气氛中制备了较小的金红石和锐钛矿薄膜。前者的选择大大提高了二氧化钛薄膜的感测性能。研究了某些还原性气体（甲烷，丙酮，乙醇和液化石油气）的气体敏感性，并找到了最佳操作温度。 （C）2008 Elsevier B.V.保留所有权利。

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