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Simultaneous preparation of amorphous solid carbon films, and their cluster building blocks

机译:同时制备非晶态固体碳膜及其簇结构单元

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摘要

The chemical vapor deposition (CVD) has 'dusty plasma' condition region, under which circumstances there is a strong tendency for formation of nano-particles in the plasma by aggregation of ions. Using this phenomena carbon nano-particles have been prepared simultaneously with solid hydrogenated amorphous carbon (a-C:H) films. Transmission electron microscopy (TEM) and atomic force microscopy (AFM) were used to study the morphology of nano-particles and the film surfaces as well. Size distributions and shape factors of nano-clusters have been obtained from TEM results; their change with applied self-bias voltage was also examined. The bonding properties of deposited layers and nano-clusters were investigated by infrared spectroscopy. A comparative analysis concerning the morphology of the films and the nano-clusters was performed. (c) 2005 Elsevier B.V. All rights reserved.
机译:化学气相沉积(CVD)具有“尘土等离子体”条件区域,在这种情况下,存在通过离子聚集在等离子体中形成纳米粒子的强烈趋势。利用这种现象,已经与固体氢化非晶碳(a-C:H)膜同时制备了碳纳米颗粒。透射电子显微镜(TEM)和原子力显微镜(AFM)用于研究纳米粒子和薄膜表面的形貌。从TEM结果获得了纳米团簇的尺寸分布和形状因子。还检查了它们随施加的自偏置电压的变化。通过红外光谱研究了沉积层和纳米团簇的结合性能。进行了关于膜和纳米团簇的形态的比较分析。 (c)2005 Elsevier B.V.保留所有权利。

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