DC magnetron power dependence of a-SiC : H IR absorption properties

Stamate MD; Lazar I; Lazar G

首页> 外文期刊>Journal of Non-Crystalline Solids: A Journal Devoted to Oxide, Halide, Chalcogenide and Metallic Glasses, Amorphous Semiconductors, Non-Crystalline Films, Glass-Ceramics and Glassy Composites >DC magnetron power dependence of a-SiC : H IR absorption properties

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DC magnetron power dependence of a-SiC : H IR absorption properties

机译：a-SiC的直流磁控管功率依赖性：H IR吸收特性

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The infrared absorption properties of a-SiC:H thin films dependence with the dc magnetron power density were investigated. The films were deposited in a mixture of CH4, H-2 and Ar. The target used was polycrystalline Si. We found that the de magnetron power density has an important contribution to the film composition. There is a strong dependence of the Si-H and Si-C bonds with the dc power density. (c) 2007 Elsevier B.V. All rights reserved.

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《Journal of Non-Crystalline Solids: A Journal Devoted to Oxide, Halide, Chalcogenide and Metallic Glasses, Amorphous Semiconductors, Non-Crystalline Films, Glass-Ceramics and Glassy Composites》 |2008年第1期|共4页
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Stamate MD; Lazar I; Lazar G;
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正文语种 eng
中图分类晶体学;
关键词
sputtering; silicon carbide; absorption; lnfrared properties; CHEMICAL-VAPOR-DEPOSITION; AMORPHOUS-SILICON-CARBIDE; CARBON ALLOYS; FILMS; PLASMA; TEMPERATURE;

机译：溅射;碳化硅;吸收;红外性能;化学气相沉积;非晶硅碳化物;碳合金;薄膜;等离子;温度;

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1. DC magnetron power dependence of a-SiC : H IR absorption properties [J] . Stamate MD, Lazar I, Lazar G Journal of Non-Crystalline Solids: A Journal Devoted to Oxide, Halide, Chalcogenide and Metallic Glasses, Amorphous Semiconductors, Non-Crystalline Films, Glass-Ceramics and Glassy Composites . 2008,第1期

机译：a-SiC的直流磁控管功率依赖性：H IR吸收特性
2. Effect of Cu addition on the microstructure and properties of TiB2 films deposited by a hybrid system combining high power impulse magnetron sputtering and pulsed dc magnetron sputtering [J] . Ding Ji Cheng, Zhang Teng Fei, Yun Je Moon, Surface & Coatings Technology . 2018,第期

机译：Cu的作用对由高功率脉冲磁控溅射和脉冲DC磁控溅射组合的混合系统沉积的TIB2膜微观结构和性能
3. Comparison of the structural properties and residual stress of AlN films deposited by dc magnetron sputtering and high power impulse magnetron sputtering at different working pressures [J] . K. Ait Aissa, A. Achour, J. Camus, Thin Solid Films . 2014,第jana1期

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4. SIMS and auger investigation of thin a-SiC and a-SiC:H films by Up-Down sputtering DC magnetron, impact on optical properties [C] . Ouadfel M.A., Keffous A., Cheriet A., 2014 North African Workshop on Dielectric Materials for Photovoltaic Systems . 2014

机译：上下溅射直流磁控管对a-SiC和a-SiC：H薄膜的SIMS和螺旋钻研究，对光学性能的影响
5. Investigation of the effect of hafnium and chromium additions on the microstructures and short-term oxidation properties of DC magnetron sputtered beta-nickel-aluminum bond coats deposited on nickel-based superalloys. [D] . Bestor, Michael A. 2010

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6. The Influence of AlN Intermediate Layer on the Structural and Chemical Properties of SiC Thin Films Produced by High-Power Impulse Magnetron Sputtering [O] . Nierlly Galvão, Marciel Guerino, Tiago Campos, 2016

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7. Effect of Thermal Annealing on the Optical and Structural Properties of the a-SiC Thin Films Deposited by DC Magnetron Sputtering [O] . Saloua Merazga, A. Keffous, A. Brighet, 2017

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8. Peak-Power Dependence of Rovibronic Populations Below the Quasicontinuum During IR Multiphoton Absorption [R] . Brenner, D. M. 1981

机译：红外多光子吸收过程中准连续体下Rovibronic种群的峰值功率依赖性

DC magnetron power dependence of a-SiC : H IR absorption properties

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