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Novel amorphous silicon alloy optoelectronic integrated circuits

机译:新型非晶硅合金光电集成电路

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摘要

Novel amorphous Si alloy optoelectronic integrated circuits (OEICs) were developed. The basic elements used in the amorphous OEICs were a-SiC:H p-i-n thin film light emitting diodes, dielectric optical waveguides, a-Si:II p-i-n thin film photodiodes. These elements were constructed both in the lateral and vertical configurations. It was shown that a glass substrate with a textured-surface could be used as an optical waveguide as well as a distributed Bragg reflector for amorphous OEICs. (C) 1998 Elsevier Science B.V. All rights reserved. [References: 4]
机译:开发了新型非晶硅合金光电集成电路(OEIC)。非晶OEIC中使用的基本元素是a-SiC:H p-i-n薄膜发光二极管,电介质光波导,a-Si:II p-i-n薄膜光电二极管。这些元件均以横向和垂直构型构造。结果表明,具有纹理表面的玻璃基板可以用作光波导以及用于非晶OEIC的分布式布拉格反射器。 (C)1998 Elsevier Science B.V.保留所有权利。 [参考:4]

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