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1.54 mu m photoluminescence of Er-containing N-doped a-Si : H

机译:含Er的N掺杂a-Si:H的1.54μm光致发光

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摘要

Nitrogen-doped hydrogenated amorphous SiEr (a-SiEr:H) films were deposited by co-sputtering from an Er partially covered Si target. Photoluminescence, infrared absorption and Raman spectroscopies were performed as a function of thermal annealing treatments and Er concentrations. As-deposited N-doped a-SiEr:H samples exhibit 1.54 mu m Er3+ photoluminescence at room temperature and reaches its maximum after cumulative thermal annealing at - 500 degrees C. in addition to the Er3+ light emission increase, thermal annealing induces the effusion of hydrogen and nitrogen bonded to silicon atoms. The experimental data indicate that both the hydrogen and nitrogen concentration improve the Er3+ light emission at 1.54 mu m by decreasing the rate of non-radiative processes. (C) 1998 Elsevier Science B.V. All rights reserved. [References: 22]
机译:氮掺杂的氢化非晶SiEr(a-SiEr:H)膜是通过从部分覆盖的Er靶上共溅射而沉积的。进行光致发光,红外吸收和拉曼光谱作为热退火处理和man浓度的函数。沉积的N掺杂a-SiEr:H样品在室温下具有1.54μm的Er3 +光致发光,并且在-500摄氏度下累积热退火后达到最大值,除了Er3 +发光增加之外,热退火还会引起E3 +的渗出。氢和氮键合到硅原子上。实验数据表明,氢和氮的浓度均通过降低非辐射过程的速率而改善了1.54μm处Er3 +的发光。 (C)1998 Elsevier Science B.V.保留所有权利。 [参考:22]

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