Amorphous silicon solar cells deposited at high growth rate

Nishimoto T.; Takai M.; Miyahara H.; Kondo M.; Matsuda A.

首页> 外文期刊>Journal of Non-Crystalline Solids: A Journal Devoted to Oxide, Halide, Chalcogenide and Metallic Glasses, Amorphous Semiconductors, Non-Crystalline Films, Glass-Ceramics and Glassy Composites >Amorphous silicon solar cells deposited at high growth rate

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Amorphous silicon solar cells deposited at high growth rate

机译：以高生长速率沉积的非晶硅太阳能电池

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A series of investigations was performed to improve stabilized efficiency of hydrogenated amorphous silicon (a-Si:H) solar cells deposited at a high growth rate of 15-20 A/s by the plasma-enhanced chemical vapor deposition method. The deterioration of film stability accompanied by an increase of deposition rate was found to be closely correlated with the increase of Si-H, bond hydrogen content in the deposited film. Plasma diagnosis results by quadrupole mass spectrometry and optical emission spectroscopy showed that reduction of electron temperature of plasma can effectively suppress the formation of higher-order silane-related species in the plasma and can improve film stability. According to the guiding principles deduced from the plasma diagnosis, we successfully improved the stability of cell performance and obtained a considerably improved stabilized efficiency of 8.2% at a high rate of 20 Angstrom/s. Key issues for improving stabilized efficiency of high growth-rate a-Si:H solar cells. by making the best use of plasma diagnostic techniques, are presented and discussed. (C) 2002 Elsevier Science B.V. All rights reserved. [References: 13]

机译：进行了一系列研究，以提高通过等离子体增强化学气相沉积法以15-20 A / s的高生长速度沉积的氢化非晶硅（a-Si：H）太阳能电池的稳定效率。发现伴随沉积速率增加的膜稳定性劣化与沉积膜中Si-H键氢含量的增加密切相关。通过四极质谱和光发射光谱法进行的等离子体诊断结果表明，降低等离子体的电子温度可以有效地抑制等离子体中高阶硅烷相关物质的形成，并可以改善薄膜稳定性。根据从血浆诊断得出的指导原则，我们成功地提高了电池性能的稳定性，并以20埃/秒的高速率获得了8.2％的大幅提高的稳定效率。改善高生长速率a-Si：H太阳能电池稳定效率的关键问题。通过充分利用血浆诊断技术，进行了介绍和讨论。（C）2002 Elsevier Science B.V.保留所有权利。 [参考：13]

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《Journal of Non-Crystalline Solids: A Journal Devoted to Oxide, Halide, Chalcogenide and Metallic Glasses, Amorphous Semiconductors, Non-Crystalline Films, Glass-Ceramics and Glassy Composites》 |2002年第2期|共7页
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Nishimoto T.; Takai M.; Miyahara H.; Kondo M.; Matsuda A.;
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1. Optimization of the stabilized performance of amorphous silicon solar cells deposited at high growth rates by de-coupling of gas and superstrate temperatures [J] . Ganguly G., Oswald RS., Carlson DE. Applied Surface Science . 2004,第1a4期

机译：通过气体和表面温度的去耦合优化以高生长速率沉积的非晶硅太阳能电池的稳定性能
2. Amorphous silicon films and solar cells deposited by HWCVD at ultra-high deposition rates [J] . Mahan AH., Xu Y., Iwaniczko E., Journal of Non-Crystalline Solids: A Journal Devoted to Oxide, Halide, Chalcogenide and Metallic Glasses, Amorphous Semiconductors, Non-Crystalline Films, Glass-Ceramics and Glassy Composites . 2002,第Pta1期

机译：通过HWCVD以超高沉积速率沉积的非晶硅膜和太阳能电池
3. Effect of textured glass substrates coated with LPCVD-deposited SnO2:F on amorphous silicon solar cells [J] . Chowdhury Amartya, Kang Dong-Won, Isshiki Masanobu, Solar Energy Materials and Solar Cells: An International Journal Devoted to Photovoltaic, Photothermal, and Photochemical Solar Energy Conversion . 2015,第Null期

机译：LPCVD沉积SnO2：F涂覆的纹理玻璃基板对非晶硅太阳能电池的影响
4. Amorphous Silicon and Silicon Germanium Alloy Solar Cells Deposited by VHF at High Rates [C] . Jeffrey Yang, Baojie Yan, Jozef Smeets, Symposium on Amorphous and Heterogeneous Silicon-Based Films-2001, Apr 16-20, 2001, San Francisco, California . 2001

机译：VHF高速率沉积非晶硅和硅锗合金太阳能电池
5. Thin film silicon by a microwave plasma deposition technique: Growth and devices, and, interface effects in amorphous silicon/crystalline silicon solar cells. [D] . Jagannathan, Basanth. 1998

机译：通过微波等离子体沉积技术的薄膜硅：非晶硅/晶体硅太阳能电池中的生长和器件以及界面效应。
6. Low-Temperature Growth of Hydrogenated Amorphous Silicon Carbide Solar Cell by Inductively Coupled Plasma Deposition Toward High Conversion Efficiency in Indoor Lighting [O] . Ming-Hsuan Kao, Chang-Hong Shen, Pei-chen Yu, -1

机译：感应耦合等离子体沉积在室内照明中实现高转化效率的低温生长氢化非晶碳化硅太阳能电池
7. Advanced polycrystalline silicon thin film solar cells using high rate plasma enhanced chemical vapour deposited amorphous silicon on textured glass [O] . Jin Guangyao Photovoltaics Renewable Energy Engineering Faculty of Engineering UNSW 2010

机译：使用高速率等离子体增强化学气相沉积非晶硅在带纹理的玻璃上的先进多晶硅薄膜太阳能电池

Amorphous silicon solar cells deposited at high growth rate

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