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首页> 外文期刊>Journal of Non-Crystalline Solids: A Journal Devoted to Oxide, Halide, Chalcogenide and Metallic Glasses, Amorphous Semiconductors, Non-Crystalline Films, Glass-Ceramics and Glassy Composites >Optical and surface properties of inorganic and hybrid organic-inorganic silica-titania sol-gel planar waveguides
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Optical and surface properties of inorganic and hybrid organic-inorganic silica-titania sol-gel planar waveguides

机译：无机和杂化有机-无机二氧化硅-二氧化钛溶胶-凝胶平面波导的光学和表面性质

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摘要

Inorganic and hybrid organic-inorganic silica (SiO_2)-titania (TiO_2) planar waveguides, with a relative molar composition 70-30, have been fabricated by sol-gel dip-coating. The composition and the density of the film samples have been measured by Rutherford backscattering spectrometry, nuclear reaction analysis and elastic recoil detection analysis. The measured compositions have been found to agree with the nominal composition of the sols. The film density of the inorganic samples increased with the firing temperature in the range 1.80-2.58. A root mean square roughness (rms) < 1 nm was measured on the surface of the samples by atomic force microscopy. A refractive index in the range 1.61-1.54 was measured (#lambda#632.8 nm). The inorganic waveguides had smaller losses (approx 0.3 dB cm~(-1)) compared to the hybrid waveguides (approx 1 dB cm~(-1)).
机译：通过溶胶-凝胶浸涂法制备了相对摩尔组成为70-30的无机和杂化有机-无机二氧化硅（SiO_2）-二氧化钛（TiO_2）平面波导。薄膜样品的组成和密度已通过卢瑟福背散射光谱，核反应分析和弹性反冲检测分析进行了测量。已经发现测量的组成与溶胶的标称组成一致。无机样品的膜密度在1.80-2.58的范围内随焙烧温度的增加而增加。通过原子力显微镜在样品表面上测量均方根粗糙度（rms）<1 nm。测量折射率在1.61-1.54范围内（λλ＃632.8nm）。与混合波导（大约1 dB cm〜（-1））相比，无机波导的损耗较小（大约0.3 dB cm〜（-1））。

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