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首页> 外文期刊>Journal of Non-Crystalline Solids: A Journal Devoted to Oxide, Halide, Chalcogenide and Metallic Glasses, Amorphous Semiconductors, Non-Crystalline Films, Glass-Ceramics and Glassy Composites >Hydrogen related bonding structure in hydrogenated polymorphous and microcrystalline silicon
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Hydrogen related bonding structure in hydrogenated polymorphous and microcrystalline silicon

机译：氢化多晶硅和微晶硅中与氢有关的键结构

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摘要

We investigate the hydrogen related bonding structure in hydrogenated polymorphous silicon films (pm-Si:H) and hydrogenated microcrystalline silicon. Infra-red spectra reveal some new features for both kinds of films. namely new modes appearing in the stretching band. We propose that this peculiar hydrogen bonding occurs at the surface of crystallites in a platelet-like configuration. Increasing the size of the crystallites increases the size of the platelets so that the compactness of the resulting films decreases as shown by mass density measurements. We show that this peculiar hydrogen bonding is responsible for the low temperature (LT) effusion peak. These results point towards a metastable nature of the crystallites contributing to the growth of pm-Si:H films. () 2002 Elsevier Science B.V. All rights reserved. [References: 19]
机译：我们研究氢化多晶硅薄膜（pm-Si：H）和氢化微晶硅中与氢有关的键结构。红外光谱揭示了两种胶片的一些新功能。即在拉伸带中出现了新的模式。我们提出，这种特殊的氢键以小片状构型出现在微晶表面。如质量密度测量所示，增加微晶的尺寸会增加血小板的尺寸，使得所得膜的致密性降低。我们表明，这种独特的氢键是低温（LT）渗出峰的原因。这些结果表明，导致pm-Si：H薄膜生长的晶粒具有亚稳的性质。 （）2002 Elsevier Science B.V.保留所有权利。 [参考：19]

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