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首页> 外文期刊>Journal of Micromechanics and Microengineering >Modeling and experimental characterization of the chevron-type bi-stable microactuator
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Modeling and experimental characterization of the chevron-type bi-stable microactuator

机译：人字形双稳态微执行器的建模与实验表征

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A compliant bi-stable micromechanism allows two stable states within its operation range to remain at one of the local minimum states of potential energy. Bi-stable energy characteristics offer two distinct and repeatable stable states that require no power input to maintain. In this paper we suggest a new theoretical model of the chevron-type bi-stable microactuator using equivalent stiffness in the rectilinear and rotational directions. From this model, the range of the spring stiffness in which the bi-stable mechanism can be operated is analyzed and compared with the results of finite element analysis (FEA) for buckling analysis. The analysis of the equivalent stiffness model shows that the forces necessary for the forward and backward actuation are almost linearly proportional to the equivalent stiffness, also in agreement with that of FEA. Based on the analysis, a novel chevron-type bi-stable microelectromechanical systems (MEMS) actuator with hinges and coupling bars is proposed for the improvement of a stable latch-up operation. The thickness and orientation of the hinge is determined through FEA in the light of reliable operation, stroke requirement, mechanical stress, and process constraint. The change in the cross-sectional area during the fabrication process is also considered to take into account its effects on the reduction of equivalent stiffness of the bi-stable MEMS actuator. The fabricated chevron-type microactuator showed a reliable bi-stable operation with a 60 mum stroke at 36 V input voltage, in agreement with the results of the equivalent stiffness model. Therefore, these results confirm that the chevron-type bi-stable MEMS actuator using hinges with coupling bars is applicable to optical switches. [References: 15]
机译：顺应性的双稳态微机制允许其工作范围内的两个稳定状态保持在势能的局部最小状态之一。双稳态能量特性提供了两个独特且可重复的稳定状态，无需输入任何功率即可维持。在本文中，我们提出了一种新的人字形双稳态微执行器理论模型，该模型在直线和旋转方向上具有等效刚度。从该模型中，可以分析可运行双稳态机构的弹簧刚度范围，并将其与屈曲分析的有限元分析（FEA）结果进行比较。对等效刚度模型的分析表明，向前和向后致动所需的力几乎与等效刚度成线性比例，这也与FEA一致。基于分析，提出了一种新型的人字形双稳态微机电系统（MEMS）致动器，具有铰链和连接杆，以改善稳定的闩锁操作。根据可靠的操作，行程要求，机械应力和工艺约束，可通过FEA确定铰链的厚度和方向。在制造过程中横截面积的变化也被认为是考虑到其对降低双稳态MEMS致动器等效刚度的影响。制成的V形人字型微执行器在36 V输入电压下显示出可靠的双稳态运行，冲程为60 mm，与等效刚度模型的结果一致。因此，这些结果证实了使用具有耦合杆的铰链的人字形双稳态MEMS致动器可应用于光学开关。 [参考：15]

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