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首页> 外文期刊>Journal of Micromechanics and Microengineering >Micro-electrical discharge machining of 3D micro-molds from Pd40Cu30P20Ni10 metallic glass by using laminated 3D micro-electrodes
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Micro-electrical discharge machining of 3D micro-molds from Pd40Cu30P20Ni10 metallic glass by using laminated 3D micro-electrodes

机译：使用层压3D微电极对Pd40Cu30P20Ni10金属玻璃进行3D微模具的微电火花加工

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摘要

For obtaining 3D micro-molds with better surface quality (slight ridges) and mechanical properties, in this paper 3D micro-electrodes were fabricated and applied to micro-electrical discharge machining (micro-EDM) to process Pd4oCu301320Niio metallic glass. First, 100 on-thick Cu foil was cut to obtain multilayer 2D micro-structures and these were connected to fit 3D micro-electrodes (with feature sizes of less than 1mm) Second, under the voltage of 80V, pulse frequency of 0.2MHZ, pulse width of 800 ns and pulse interval of 4200 ns, the 3D micro -electrodes were applied to micro-EDM for processing Pd40Cu30P20Ni10 metallic glass. The 3D micro -molds with feature within 1 nun were obtained. Third, scanning electron microscope, energy dispersive spectroscopy and x-ray diffraction analysis were carried out on the processed results. The analysis results indicate that with an increase in the depth of micro-EDM, carbon on the processed surface gradually increased from 0.5% to 5.8%, and the processed surface contained new phases (Ni12Cu3P).
机译：为了获得具有更好的表面质量（浅脊）和机械性能的3D微模具，本文制造了3D微电极并将其应用于微放电加工（micro-EDM）以处理Pd4oCu301320Niio金属玻璃。首先，切割100层厚的铜箔以获得多层2D微结构，然后将它们连接以适合3D微电极（特征尺寸小于1mm）。其次，在80V的电压下，脉冲频率为0.2MHZ，脉冲宽度为800 ns，脉冲间隔为4200 ns，将3D微电极应用于微型EDM以加工Pd40Cu30P20Ni10金属玻璃。获得了特征在1尼以内的3D微模具。第三，对处理结果进行了扫描电子显微镜，能量色散谱和X射线衍射分析。分析结果表明，随着微细电火花加工深度的增加，加工表面的碳逐渐从0.5％增加到5.8％，加工表面含有新相（Ni12Cu3P）。

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