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首页> 外文期刊>Journal of Micromechanics and Microengineering >Dynamic characteristics of shaped micro-actuators solved using the differential quadrature method
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Dynamic characteristics of shaped micro-actuators solved using the differential quadrature method

机译：用微分求积法求解成形微执行器的动态特性

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This study examined the dynamic characteristics of nonlinear electrostatic pull-in behavior for shaped actuators in micro-electro-mechanical systems (MEMS). The natural frequencies of a fixed-fixed shaped beam vibrating around its statically deflected position were calculated using the differential quadrature method (DQM). The proposed model included the nonlinear interaction between the curved electrostatic field force and the shaped micro-beam, as well as the mid-plane stretching, axial residual stress and electrical field fringing effect. Very good agreement existed between the results simulated using the proposed model and the measured data. This work also investigated the micro-beam and electrode shape effect on the natural frequencies of the actuator system. Analytical results indicate that the variation in the micro-beam and the electrode shapes might not only influence the electrostatic field distribution but also significantly alter the dynamic characteristics of the micro-actuator. Analytical results demonstrate that the shaped micro-beam with curved electrode can increase the working voltage range approximately six times compared to the rectangular micro-beam and flat electrode.
机译：这项研究检查了微机电系统（MEMS）中成形驱动器的非线性静电吸合行为的动态特性。使用微分求积法（DQM）计算了绕其静态挠曲位置振动的定形梁的固有频率。所提出的模型包括弯曲的静电场力和成形的微束之间的非线性相互作用，以及中平面拉伸，轴向残余应力和电场边缘效应。使用所提出的模型模拟的结果和测量的数据之间存在很好的一致性。这项工作还研究了微束和电极形状对执行器系统固有频率的影响。分析结果表明，微束和电极形状的变化不仅可能影响静电场分布，而且还会显着改变微致动器的动态特性。分析结果表明，与矩形微束和扁平电极相比，带有弯曲电极的成形微束可以将工作电压范围提高大约六倍。

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