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首页> 外文期刊>Journal of Micromechanics and Microengineering >Study of the electrical contact resistance of multi-contact MEMS relays fabricated using the MetalMUMPs process
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Study of the electrical contact resistance of multi-contact MEMS relays fabricated using the MetalMUMPs process

机译：使用MetalMUMPs工艺制造的多触点MEMS继电器的电接触电阻的研究

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摘要

The reliability of electrostatically actuated ohmic contact type MEMS relays has been investigated. Multi-contact MEMS relays laterally actuated using electrostatic comb-drive actuators were used in this study. The MEMS relays were fabricated using the MetalMUMPs process, which uses a 20 mu m thick electroplated nickel as the structural layer. A 3 mu m thick gold layer was electroplated on the electrical contact surfaces. An example MEMS relay with planar contacts of area 80 mu m x 20 mu m and spacing of 10 mu m between the movable and fixed contacting surfaces is discussed. The overall size of the relay is approximately 3 mm x 3 mm. 'Resistance versus applied voltage' characteristics have been studied. At an applied dc bias voltage of 120 V, the movable fingers make initial contact with the fixed fingers. The 'resistance versus applied voltage' characteristics have been measured for an applied bias voltage in the range of 172 - 220 V. Reliability testing of the MEMS relay up to one million actuations has been carried out and the resistance degradation with actuation cycles is discussed.
机译：已经研究了静电激励欧姆接触型MEMS继电器的可靠性。在这项研究中使用了由静电梳状驱动致动器横向致动的多触点MEMS继电器。 MEMS继电器采用MetalMUMPs工艺制造，该工艺使用20微米厚的电镀镍作为结构层。在电接触表面上电镀3微米厚的金层。讨论了一个示例MEMS继电器，其平面触点面积为80μmx 20μm，可动和固定接触面之间的间距为10μm。继电器的整体尺寸约为3 mm x 3 mm。已经研究了“电阻与施加电压”的特性。在施加的直流偏置电压为120 V的情况下，可移动指状物会与固定指状物进行初始接触。已针对172-220 V范围内的施加偏置电压测量了“电阻与施加电压”的特性。已对MEMS继电器进行了多达一百万次驱动的可靠性测试，并讨论了随着驱动循环而产生的电阻衰减。

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