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首页> 外文期刊>Journal of Micromechanics and Microengineering >Polymeric nanofeatures of 100 nm using injection moulding for replication
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Polymeric nanofeatures of 100 nm using injection moulding for replication

机译：使用注射成型进行复制的100 nm聚合纳米特征

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摘要

The filling efficiency of replicated nanofeatures made with polymers using injection moulding with various moulding factors was investigated. Two simple calibration gratings with nanofeatures of 105 nm and 130 nm, respectively, were used as mould inserts to replicate nanofeatures by means of a custom-made injection machine. Nanofeatures made with polypropylene (PP), polystyrene (PS), polycarbonate (PC) and polymethylmethacrylate (PMMA) were tested because of differing viscosities and shrinkages in polymers. The results show that the surface configuration of the polymeric nanofeatures with low melt viscosity could be moulded well, while nanofeatures with high melt viscosity exhibited higher tolerance in depth. However, the moulding depth of nanofeatures could be effectively improved when mould temperature and forming pressure were higher. It was found that the reproducibility of the nanofeatures in large numbers could be replicated well after melt and mould temperatures became stable during moulding.
机译：研究了使用不同成型因子的注塑成型方法，用聚合物制成的复制纳米特征的填充效率。使用两个分别具有105 nm和130 nm纳米特征的简单校准光栅作为模具插件，通过定制的注塑机复制纳米特征。由于聚合物的粘度和收缩率不同，因此对由聚丙烯（PP），聚苯乙烯（PS），聚碳酸酯（PC）和聚甲基丙烯酸甲酯（PMMA）制成的纳米材料进行了测试。结果表明，具有低熔体粘度的聚合物纳米特征的表面构型可以很好地成型，而具有高熔体粘度的纳米特征表现出更高的深度耐受性。然而，当模具温度和成型压力较高时，可以有效地改善纳米特征的成型深度。发现在模制期间熔融和模具温度变得稳定之后，可以很好地复制大量纳米特征的再现性。

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