...
首页> 外文期刊>Journal of Micromechanics and Microengineering >The fabrication and test of a square prism shaped dye micro laser based on the SU-8 molding process
【24h】

The fabrication and test of a square prism shaped dye micro laser based on the SU-8 molding process

机译:基于SU-8成型工艺的方形棱镜型染料微激光器的制造与测试

获取原文
获取原文并翻译 | 示例
           

摘要

A dielectric micro cavity of dye doped polydimethylsiloxane (PDMS) is fabricated by the SU-8 photoresist molding technique. The orthogonal array was adopted in our experiments for improving the pattern quality and analyzing the interaction among the process parameters. The molding technique by fabricating a solid polymer dye micro cavity laser is described in detail. The dye laser operation of the micro cavity has been confirmed.
机译:染料掺杂的聚二甲基硅氧烷(PDMS)的介电微腔是通过SU-8光致抗蚀剂成型技术制成的。在我们的实验中采用正交阵列来改善图案质量并分析工艺参数之间的相互作用。详细描述了通过制造固体聚合物染料微腔激光器的成型技术。微腔的染料激光操作已得到确认。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号