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首页> 外文期刊>Journal of Micromechanics and Microengineering >Localized electrochemical deposition process improvement by using different anodes and deposition directions
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Localized electrochemical deposition process improvement by using different anodes and deposition directions

机译：通过使用不同的阳极和沉积方向来改进局部电化学沉积工艺

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摘要

The localized electrochemical deposition method has demonstrated its capability in the fabrication of microstructures with a high aspect ratio and complicated geometry. In this study, the improvement of the porosity problem of the deposited structure was attempted by employing different designs of the anode and deposition directions. An anode with higher strength to withstand the cavitation of the generated gas bubbles at the end tip was fabricated. Moreover, the direction of deposition was changed from vertical to horizontal to facilitate the escape of the gas bubbles from the electrode gap. The effect of the improvement was examined both qualitatively and quantitatively. The fundamental resonance frequency of the fabricated cantilevered microcolumn was measured and the apparent density, thereby the porosity, of the deposited structure was quantified. Finally, possible application of the process was demonstrated by the example of a spiral 3D structure.
机译：局部电化学沉积方法已经证明了其在制造具有高纵横比和复杂几何形状的微结构中的能力。在这项研究中，试图通过采用阳极和沉积方向的不同设计来改善沉积结构的孔隙率问题。制造了具有更高强度的阳极，以承受在末端产生的气泡的气蚀。而且，沉积方向从垂直改变为水平，以促进气泡从电极间隙逸出。对该改进的效果进行了定性和定量检查。测量所制造的悬臂式微柱的基本共振频率，并量化表观密度，从而定量沉积结构的孔隙率。最后，通过螺旋3D结构的示例演示了该过程的可能应用。

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