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首页> 外文期刊>Journal of Micromechanics and Microengineering >Flow characteristics in a microchannel system integrated with arrays of micro-pressure sensors using a polymer material
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Flow characteristics in a microchannel system integrated with arrays of micro-pressure sensors using a polymer material

机译：在微通道系统中的流动特性与使用聚合物材料的微压传感器阵列集成在一起

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摘要

The use of a polymer material to fabricate a complicated microchannel system that is integrated with arrays of pressure sensors is presented. This channel can allow either gas or liquid to flow through for basic microfluidic studies. This developed fabrication process is much simpler, and is almost the reverse of the surface micromachining process usually used for the microchannel system. This allows for the use of SU-8 to fabricate, by lithography, the diaphragm and the cavities used for these pressure sensors and the channel. The height for the diaphragm, the cavities and the channel can be readily varied from few to hundreds of microns by spin-coating different thicknesses of the SU-8 layer. This will allow a much wider measurement range and flow conditions. More detailed design and developed fabrication techniques are presented. The pressure distributions are measured inside the channel and are compared with the analysis. The results obtained in this work clarify some of the arguments which existed in the literature.
机译：提出了使用聚合物材料来制造与压力传感器阵列集成的复杂的微通道系统。该通道可以允许气体或液体流过，以进行基本的微流体研究。这种发达的制造工艺要简单得多，并且几乎与通常用于微通道系统的表面微加工工艺相反。这允许使用SU-8通过光刻制造用于这些压力传感器和通道的隔膜和腔体。通过旋涂不同厚度的SU-8层，可以轻松地将膜片，空腔和通道的高度从几微米更改为几百微米。这将允许更大的测量范围和流量条件。介绍了更详细的设计和开发的制造技术。在通道内部测量压力分布，并将其与分析结果进行比较。这项工作获得的结果澄清了文献中存在的一些论点。

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