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首页> 外文期刊>Journal of Micromechanics and Microengineering >Towards a nanostructured thermoelectric generator using ion-track lithography
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Towards a nanostructured thermoelectric generator using ion-track lithography

机译：迈向使用离子跟踪光刻技术的纳米结构热电发生器

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This paper presents the process development towards a new generation of nanostructured thermoelectric generators for power harvesting from small temperature gradients by using a combination of traditional silicon microfabrication techniques, electroplating and submicron ion-track nanolithography. Polyimide nanotemplates with pore diameters ranging from 30 nm to 120 nm were fabricated. Preliminary results from the fabrication of poly(methyl methacrylate) (PMMA)-nanostructured templates are reported. Bi{sub}2Te{sub}3 nanowires (80 and 120 nm diameters) were electroplated into polyimide ion-track nanotemplates. Bi{sub}2Te{sub}3 nanowires of a R3 m structure, with preferential orientation in (110) crystallographic plans, were electroplated. The chemical composition of Bi{sub}2Te{sub}3 with nearly stoichiometric composition (Bi{sub}2.31Te{sub}3) was obtained. Homogeneity profiles of the chemical composition were obtained. A fine-grained observed microstructure (6-10 nm) and (110) crystalline orientation were obtained, which is extremely promising for improving the thermoelectric material properties. The thermoelectric properties of the Bi2Te3-electroplated thin films (Seebeck coefficient a) and electrical resistivity of the Bi{sub}2Te{sub}3 bundle nanowires were found to be -52 μV K{sup}(-1) and ～14 MΩ cm, respectively. Polyimide (Kapton foil) and PMMA 950 photoresists were promising materials for the realization of a nanostructured thermoelectric generator on flexible and rigid substrates, respectively.
机译：本文介绍了通过结合传统硅微加工技术，电镀和亚微米离子跟踪纳米光刻技术，从较小的温度梯度收集功率的新一代纳米结构热电发电机的工艺开发。制备了孔径范围为30 nm至120 nm的聚酰亚胺纳米模板。报道了由聚（甲基丙烯酸甲酯）（PMMA）-纳米结构模板的制备获得的初步结果。将Bi {sub} 2Te {sub} 3纳米线（直径分别为80和120 nm）电镀到聚酰亚胺离子跟踪纳米模板中。电镀R3 m结构的Bi {sub} 2Te {sub} 3纳米线，在（110）晶体学计划中具有优先取向。获得具有近化学计量组成的Bi {sub} 2Te {sub} 3（Bi {sub} 2.31Te {sub} 3）的化学组成。获得了化学组成的均一性分布图。获得了细粒度的观察到的微结构（6-10 nm）和（110）晶体取向，这对于改善热电材料的性能极有希望。发现Bi2Te3电镀薄膜的热电性能（塞贝克系数a）和Bi {sub} 2Te {sub} 3束纳米线的电阻率为-52μVK {sup}（-1）和〜14MΩ厘米。聚酰亚胺（Kapton箔）和PMMA 950光刻胶是有前途的材料，可用于分别在柔性和刚性基板上实现纳米结构热电发生器。

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