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首页> 外文期刊>Journal of Micromechanics and Microengineering >Development of a 'bi-layer lift-off' method for high flow rate and high frequency Nitinol MEMS valve fabrication
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Development of a 'bi-layer lift-off' method for high flow rate and high frequency Nitinol MEMS valve fabrication

机译：开发用于高流量和高频镍钛诺MEMS阀的“双层剥离”方法

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摘要

This paper presents modeling, fabrication and testing results for a high flow rate and high frequency nickel titanium alloy (Nitinol) MEMS valve. ANSYS is used to evaluate several Nitinol MEMS valve structural designs with the conclusion that a pentagonal flap with five legs produces higher frequencies and higher strengths without the inherent rotation problem present in four-leg designs. The Nitinol penta-leg design was fabricated using a novel bi-layer lift-off method. A polymethylglutarimide (PMGI) polymer layer is initially used as an underlayer while a chromium layer is used as a top layer to produce a non-rotational ortho-planar Nitinol MEMS valve array without the problems inherent in conventional Nitinol wet etching. The array consists of 65 microvalves with a single valve having dimensions of 1 mm circumference, 50 μm leg width and 8.2 μm Nitinol thickness. Each microvalve covers an orifice of 220 μm diameter and 500 μm in length and is capable of producing 150 μm vertical deflection. The Nitinol MEMS valve array was tested for flow rates in a hydraulic system as a function of applied pressure with a maximum water flow rate of 16.44 cc s{sup}{-1}.
机译：本文介绍了高流量和高频镍钛合金（Nitinol）MEMS阀的建模，制造和测试结果。 ANSYS用于评估几种镍钛诺MEMS阀的结构设计，得出的结论是，五支腿的五边形阀瓣产生更高的频率和强度，而四支腿设计中没有固有的旋转问题。镍钛诺五脚设计是使用新型双层剥离方法制造的。最初将聚甲基戊二酰亚胺（PMGI）聚合物层用作底层，而将铬层用作顶层，以生产非旋转的正交平面Nitinol MEMS阀阵列，而不会出现常规Nitinol湿法蚀刻所固有的问题。该阵列由65个微阀组成，其中一个阀的尺寸为周长1 mm，腿宽50μm，镍钛诺厚度为8.2μm。每个微阀覆盖直径为220μm，长度为500μm的孔，并能够产生150μm的垂直偏转。测试了镍钛诺MEMS阀阵列在液压系统中的流速，该流速是所施加压力的函数，最大水流速为16.44 cc s {sup} {-1}。

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