Electrical discharge across micrometer-scale gaps for planar MEMS structures in air at atmospheric pressure

Fabian W. Strong; Jack L. Skinner; Norman C. Tien

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Electrical discharge across micrometer-scale gaps for planar MEMS structures in air at atmospheric pressure

机译：大气压下空气中平面MEMS结构的跨微米级间隙的放电

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We examine electrical discharge current responses across atmospheric pressure air gaps in the 2 μm to 7 μm range between planar polysilicon microstructures to determine the physical process of electrical discharge. The effect on discharge response from shape-related field enhancement is investigated through simulated field distribution and experimental current response for devices with design variations in electrode shape. Initial Townsend discharges, between 50 pA and 400 pA, transitioned to a second stage of 2 nA to 20 nA when the applied voltage increased 13% to 21% above the initial breakdown voltage.

机译：我们检查了平面多晶硅微结构之间2μm至7μm范围内的大气压气隙的放电电流响应，以确定放电的物理过程。通过模拟场分布和具有电极形状设计变化的器件的实验电流响应，研究了形状相关的场增强对放电响应的影响。当施加电压比初始击穿电压增加13％至21％时，最初的Townsend放电（介于50 pA和400 pA之间）过渡到第二阶段，即2 nA至20 nA。

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《Journal of Micromechanics and Microengineering》 |2008年第7期|共11页
作者
Fabian W. Strong; Jack L. Skinner; Norman C. Tien;
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1. Electrical discharge across micrometer-scale gaps for planar MEMS structures in air at atmospheric pressure [J] . Fabian W. Strong, Jack L. Skinner, Norman C. Tien Journal of Micromechanics and Microengineering . 2008,第7期

机译：大气压下空气中平面MEMS结构的跨微米级间隙的放电
2. Microstructure of the current channel of an atmospheric-pressure diffuse discharge in a rod-plane air gap [J] . Repev AG, Repin PB, Pokrovskii VS Technical physics . 2007,第1期

机译：杆-平面气隙中大气压扩散放电电流通道的微观结构
3. NANOSECOND VOLUME DISCHARGES IN ATMOSPHERIC-PRESSURE AIR AND X-RAY EMISSION FROM THE DISCHARGE GAP [J] . I. D. Kostyrya, V. F. Tarasenko, A. N Tkachev, Bulletin of the Lebedev Physics Institute . 2005,第11期

机译：大气中的纳秒体积放电和放电间隙的X射线排放
4. Runaway electron preionized diffuse discharges in atmospheric pressure air in point-to-point gaps in repetitive pulsed mode [C] . Sosnin, E.A., Baksht, E.H., Tarasenko, V.F., IEEE International Conference on Plasma Science;ICOPS 2012 . 2012

机译：大气压空气中以重复脉冲模式在点对点间隙中失控的电子预离子化扩散放电
5. MEMS microswitch design for high voltage applications and electrical discharge processes for micrometer-scale gaps in an atmospheric pressure air environment. [D] . Strong, Fabian Wilbur. 2007

机译：MEMS微动开关设计用于高压应用和用于大气压空气环境中微米级间隙的放电过程。
6. Generation of a planar direct-current glow discharge in atmospheric pressure air using rod array electrode [O] . Xuechen Li, Panpan Zhang, Pengying Jia, -1

机译：使用棒状阵列电极在大气压空气中产生平面直流辉光放电
7. Electrical characterization of microdischarges produced by dielectric barrier discharge in dry air at atmospheric pressure [O] . N Jidenko, M Petit, J P Borra 2006

机译：在大气压下干燥空气中的介电阻挡放电产生的微探剂的电学特性
8. ELECTRICAL PROPERTIES OF RADIO FREQUENCY GLOW DISCHARGES IN AIR AT ATMOSPHERIC PRESSURE, [R] . schwab, h. a. 1968

机译：空气中无线电频率放电的电气特性，大气压力，

Electrical discharge across micrometer-scale gaps for planar MEMS structures in air at atmospheric pressure

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