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首页> 外文期刊>Journal of Micromechanics and Microengineering >Monolithic surface micromachined fluidic devices for dielectrophoretic preconcentration and routing of particles
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Monolithic surface micromachined fluidic devices for dielectrophoretic preconcentration and routing of particles

机译：整体表面微加工流体装置，用于介电电泳预浓缩和布放颗粒

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摘要

We describe a batch fabrication process for producing encapsulated monolithic microfluidic structures. The process relies on sacrificial layers of silicon oxide to produce surface micromachined fluid channels. Bulk micromachined interconnects provide an interface between the microchannels and meso-scale fluidics. The full integration of the fabrication processing significantly increases device reproducibility and reduces long-term costs. The design and fabrication of dielectrophoresis (DEP) gating structures configured in both batch-flow and continuous-flow modes are detailed. Highly efficient microparticle preconcentration (up to similar to 100 x in 100 s) and valving (97% particle routing efficiency) are demonstrated using ac DEP and an accompanying phase separation. The low aspect-ratio fluid channels with integrated microelectrodes are well suited for mu m and sub-mu m particle manipulation with electric fields.
机译：我们描述了用于生产封装的单片微流体结构的批处理过程。该工艺依赖于氧化硅的牺牲层来产生表面微加工的流体通道。散装的微机械互连提供了微通道和中尺度流体学之间的接口。制造过程的完全集成极大地提高了设备​​的可重复性并降低了长期成本。详细介绍了以分批流动和连续流动模式配置的介电电泳（DEP）门控结构的设计和制造。使用ac DEP和随附的相分离技术可实现高效的微粒预浓缩（在100 s内达到100x的相似值）和阀控（97％的微粒路由效率）。具有集成微电极的低深宽比流体通道非常适合于电场下的微米和亚微米颗粒操纵。

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